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304FS Datasheet(PDF) 2 Page - Agilent(Hewlett-Packard)

Part # 304FS
Description  Agilent TwisTorr 304 FS
PDF  4 Pages
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Manufacturer  HP [Agilent(Hewlett-Packard)]
Direct Link  http://www.home.agilent.com
Logo HP - Agilent(Hewlett-Packard)

304FS Datasheet(HTML) 2 Page - Agilent(Hewlett-Packard)

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Technical Specification
Pumping speed
ISO 100 / CF 6”
ISO 160 / CF 8”
N
2
He
H
2
Ar
250 L/s
255 L/s
220 L/s
250 L/s
250 L/s
255 L/s
220 L/s
250 L/s
Gas throughput at full
rotational speed (with
recomm. forepump)
Ambient Temp.
(25 °C)
Water Temp.
(25 °C, 50 L/h)
N
2
170 SCCM
170 SCCM
Ar
110 SCCM
110 SCCM
Compression ratio and foreline tolerance
N
2
He
H
2
Ar
> 1 x 1011
> 1 x 108
1.5 x 106
> 1 x 1011
>10 mbar
>10 mbar
>4 mbar
>10 mbar
Base pressure with
recommended forepump
(5 m3/h)
< 1 x 10-10 mbar
(< 1 x 10-10 Torr)
Foreline flange
KF16 NW (KF25 - optional)
Rotational speed
60000 rpm (1010 Hz driving frequency)
Start-up time
< 3 minutes
Technical Specification
Recommended forepump
mechanical: Agilent DS 102
dry pump: Agilent IDP-7
Operating position
Any
Oper. ambient temperature
+5 °C to +35 °C
Rel. humidity of air
0 to 90% (not condensing)
Bakeout temperature
80 °C at inlet flange max (ISO flange)
120 °C at inlet flange max (CFF flange)
Lubricant
Permanent grease lubrication
Cooling requirements
Forced air (5- 35 °C ambient temperature)
Water (mandatory if ambient temp. > 35 °C)
Water temperature from +15°C to +25°C
Water flow min. 100L/h
Coolant water
Minimum flow: 50 L/h (0.89 GPM)
Temperature: +15 °C to +30°C
Pressure: 3 to 5 bar (45 to 75 psi)
Noise Pressure level
< 50 dB(A) at 1 meter
Max altitude
3000 m
Weight kg (lbs)
Pump ISO 100
Pump CFF 6’’
Pump ISO 160
Pump CFF 8’’
5.5 kg (12.3)
7.5 kg (16.5)
5.7 kg (12.6)
9.7 kg (20.9)
Conformity to norms
EMC (Control Units)
Safety (CE/CSA)
ROHS
61326-1
DIR 2006/42/CE
DIR 2011/65/EU
Outline Drawing
Technical Specification
3D Drawings available for download
ISO 100K
CFF 6"
FORELINE
FLANGE KF16
ELECTRICAL
CONNECTOR
WATER
COOLING
VENT
SCREW
FORELINE
FLANGE KF16
ELECTRICAL
CONNECTOR
WATER
COOLING
PURGE
SCREW
PURGE
SCREW
VENT
SCREW
144 [5.67]
Ø
144 [5.67]
86.29
[3.40]
38 [1.50]
86.5 [3.41]
36°
27°
86.29
[3.40]
38 [1.50]
86.5 [3.41]
36°
27°
39°
39°
Ø



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