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804FS Datasheet(PDF) 2 Page - Agilent(Hewlett-Packard) |
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804FS Datasheet(HTML) 2 Page - Agilent(Hewlett-Packard) |
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2 / 4 page ![]() 2 Technical Specification Pumping speed ISO200K-F ISO250K-F CFF10 N 2 He H 2 Ar 720 L/s 660 L/s 485 L/s 690 L/s Max Gas Throughput(*) Air Cooling (25°C Air temperature) Water Cooling (15°C Water temperature / 25°C room temperature) N 2 4.3 mbarL/s 255 SCCM 6.1 mbar L/s 367 SCCM He 7.9 mbar L/s 467 SCCM 10.4 mbar L/s 615 SCCM Ar 1.5 mbar L/s 89 SCCM 3.3 mbar L/s 195 SCCM (*) Backing pump 11.6 m3/hr Compression ratio and foreline tolerance* N 2 He H 2 Ar >1E+11 2E+08 3E+06 >1E+11 10 mbar 10 mbar >4 mbar 8.5 mbar (*) Foreline Tolerance defined as the pressure at which the turbopump still produce a compression of 100 and estimated in water cooling mode Base pressure with re- comm. forepump < 1 x 10-10 mbar (< 1 x 10-10 Torr) Inlet flange ISO 200K, ISO 200F, ISO 250K, ISO 250F, CFF 10” Foreline flange NW25 or NW40 Rotational speed Auto setting from 40'800 RPM to 49'500 RPM Start-up time < 5 minutes Technical Specification Recommended forepump DS302 IDP10 IDP15 Operating position Any Oper. ambient temperature +5 °C to +35 °C Rel. humidity of air 0 to 90% (not condensing) Bakeout temperature ISO pump: 80°C at inlet flange CFF pump: 120°C at inlet flange Lubricant Permanent grease lubrication Cooling requirements Air cooling Air temperature from +5°C to 35°C Water cooling Water temperature from +15°C to +25°C Water flow min. 100L/h Noise Pressure Level (at 1m at full speed) 43dB(A) Storage temperature -40 °C to +70 °C Max altitude 3000 m Weight kg (lbs) ISO200K ISO200F ISO250K ISO250F CFF 10" 20.7 Kg / 45.5 lbs. 23.6 Kg / 51.9 lbs. 23.3 Kg / 51.2 lbs. 27.6 Kg / 60.9 lbs. 22.1 Kg / 48.6 lbs. Conformity to norms EMC (Control Units) Safety (CE/CSA) Machinery Directive Low Voltage Directive EMC Directive (Control Units) ROHS 61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU Outline Drawing Technical Specification Ø207.5 [8.17] Ø253.24 [9.97] Ø207.5 [8.17] Ø240 [9.45] 115.25 [4.54] 117.25 [4.62] 12° 115.25 [4.54] 117.25 [4.62] 12° Ø207.5 [8.17] Ø334.9 [13.19] 115.25 [4.54] 117.25 [4.62] 12° CFF 10" ISO 200K ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF25 ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF25 ISO 250F ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF40 PURGE SCREW PURGE SCREW PURGE SCREW 3D Drawings available for download |
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