DFD6750 datasheet(2/2 Pages) DISCO

2 / 2 page

www.disco.co.jp

Fully Automatic Dicing Saw

DFD6750

Specifications

2014.11

プリアライメントステージ

スピンナテーブル

ロアアーム

アッパーアーム

門型構造

チャック

テーブル

カセット

エレベータ

DFD6750 Operation flow

[1] After transferring the workpiece to Chuck Table 1, alignment

is performed. →

[2] Dicing is performed on Chuck Table 1. →

[3] While alignment for the first workpiece is being performed

on Chuck Table 1, the next workpiece is transferred to Chuck

Table 2, and alignment is performed. →

[4] When dicing is completed on Chuck Table 1, the workpiece is

transferred away. →

[5] Dicing is performed on Chuck Table 2. →

[6] While the workpiece is diced on Chuck Table 2, the next

workpiece is transferred to Chuck Table 1, and alignment is

performed. →

[7] When dicing is completed at Chuck Table 2, the workpiece is

transferred away.

Environmental Conditions

• Use clean, oil-free air (dew point between -10 - -20 , residual oil: 0.1 ppm, and filtration rating: 0.01μm/99.5 % or more).

• Keep room temperature fluctuations within ±1℃ of the set value. (Set value should be between 20 - 25 ℃).

• Keep cutting water and cleaning water 2 ℃ above room temperature (fluctuations within ±1 ℃).

• The machines should be used in an environment, free from external vibration. Do not install machine near a ventilation opening, heat generation equipment or oil mist generating parts.

• This machine uses water. In case of water leakage, please install the machine on the floor with sufficient waterproofing and drainage treatments.

* All pressures specified above are gauge pressures.

* As the above specification may change due to technical modifications.

Please confirm when placing your order.

* For further information, please contact your local sales representative.

Unit

1.8 kW

2.2 kW

Cutting rangemm

Cutting speed

mm/sec

Cutting rangemm

Index step

Index positioning

accuracy

Max. stroke

(For φ2″Blade)

(For φ3″Blade)

Moving resolution

Repeatability

accuracy

θ-axis

Max. rotating

angle

deg

Rated torque

N・m

0.29

0.7

Revolution speed

range

min

-1

6,000 - 60,000

3,000 - 30,000

0.001

215

Machine weight

Machine

dimensions(W×D×H)

Spindle

Specification

340

X-axis

300 *

0.1 - 1,000

Max. rotation diameter

Example: Max jig size

300 × 160 /280 × 140 *

0.00005

Approx.2,200

0.003/660

(Single error)0.002/5

1,510 × 1,554 × 1,800

(excluding scrap box)

Z-axis

Y1･Y2

-axis

300

0.0002

DFD6750 Datasheet(PDF) 2 Page - DISCO Corporation

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