DFP8141

Fully Automatic Polisher

Fully automatic operation

The DFP8141 is a fully automatic polisher which performs CMP processing

from cassette to cassette. With the installation of a cleaning station, wafer

cleaning and drying after processing are performed automatically.

For small workpieces made of difficult-to-

process materials

The DFP8141 supports CMP for materials such as sapphire, SiC, LT, and

LN.

process materials such as sapphire and SiC

Single wafer transfer

(Mounted on tape depending on

wafer thickness)

Substrate transfer

Frame transfer

Workpiece Transfer Configurations

A transfer system which supports three workpiece configurations

The transfer system accepts three workpiece configurations: single wafer transfer, substrate transfer, and frame transfer.

*CMP(Chemical Mechanical Polishing)