623F datasheet(2/2 Pages) MKS

2 / 2 page

Specifications and

Ordering Information

623F

11T

Full Scale Ranges

10, 20, 100, 500, and 1000 Torr

Resolution

0.001% of Full Scale

Accuracy

0.25% of Reading (including non-linearity, hysteresis, and non-repeatability)

Temperature Coefficients

Zero

0.005% of Full Scale/°C

Span

0.04% of Reading./°C

Ambient Operating Temperature

0°C to 50°C

Volume

6.3 cc

Warm-Up Time

30 minutes

Overpressure Limit

45 psia (310 kPa)

Materials Exposed to Gases

Incoloy® and Inconel® (Optional fittings: 316 SS)

Input Power Required

±15 VDC ±5% @ 75 mA

Output Signal

Pressure: 0 to +10 VDC into > 10K

Ω load

Output Relays

SPDT contacts rated at 1 Amp @ 30 VDC or 0.5 Amp @ 30 VAC resistive

Trip Point Level Signal

0.01 to 10 VDC for each trip point

Fittings

Standard

1/2" (12.7 mm) tubulation

Optional

8 VCR® female, Mini-CF, NW 16 KF, NW 25 KF

Compliance

Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and

local government export licenses under ECCN 2B230.

Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of

MKS Instruments, Inc., Andover, MA. VCR® and VCO® are registered trademarks of Swagelok Co., Solon OH. Inconel® is

a registered trademark of Inco Alloys International, Inc., Huntington, WV.

623F - 3/19

Dimensional Drawing —

Note: Unless otherwise specified, dimensions

are nominal values in inches (mm referenced).

Ordering Code Example: 623F11TAE

Model

Code

Configuration

623F

Ranges mmHg (Torr)

11T

21T

100

12T

500

52T

1000

13T

Fittings

½'' Tube

8 VCR

Mini-CF

NW 16 KF

8 VCO Female

2¾'' Rotatable CF

NW 25 KF

Accuracy (% of Reading)

0.25%

0.15% (Optional 10, 100, and 1000 Torr only)

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel: 978.645.5500

Tel: 800.227.8766 (in U.S.A.)

Web: www.mksinst.com

MKS Instruments, Inc.

Pressure & Vacuum Measurement Solutions

Six Shattuck Road

Andover, MA 01810

Tel: 978.975.2350

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