629F datasheet(2/2 Pages) MKS

2 / 2 page

01T

629F

Specifications and

Ordering Information

Full Scale Ranges

0.02 (45°C only), 0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15000, 20000, 25000 Torr

Resolution

0.001% of Full Scale (0.002% of Full Scale for 0.02 and 0.05 Torr)

Accuracy

45°C version

0.12% of Reading (including non-linearity, hysteresis, and non-repeatability) for 1 - 25,000 Torr;

0.15% of Reading for 0.25, 0.1, and 0.05 Torr; and 0.25% for 0.02 Torr

100°C version

0.25% of Reading (including non-linearity, hysteresis, and non-repeatability) for 1 - 25,000 Torr; 0.50% of

Reading for < 1 Torr

Temperature Coefficients

Zero

45°C version

0.002% of Full Scale/°C for 1-25000 Torr range; 0.005% Full Scale/°C for 0.25 and 0.1 Torr,

0.015% Full Scale/°C for 0.05 Torr, 0.03% Full Scale/°C for 0.02 Torr

100°C version

0.002% of Full Scale/°C for 1-25000 Torr, 00.01% Full Scale/oC for 0.25 and 0.1 Torr;

and 0.02% of Full Scale/°C for 0.05 Torr

Span

0.02% of Reading/°C

Ambient Operating Temperature

15°C to 40°C for 45°C version

15°C to 50°C for 100°C version

Volume

6.3 cc

Warm-Up Time

2 hours for 1 - 25,000 Torr ranges, 4 hours for ranges < 1 Torr

Overpressure Limit

45 psia (310 kPa) or 120% Full Scale, whichever is greater

Materials Exposed to Gases

Inconel®

Input Power Required

±15 VDC ±5% @ 0.25 Amps for 45°C, 0.6 Amps for 100°C

Output Signal

Pressure: 0 to +10 VDC into >10K

Ω load

Optional Features at Temperature

At temperature status: semiconductor switch will turn “ON” and corresponding green LED will be “ON”

Status (LED and Switch) and

when the instrument is at temperature. Option not available: 0.02 Torr/45°C and 0.05 Torr/100°C.

External Zero

External Zero allows voltage input that is equal to and opposite to a zero offset.

Option not available: 0.02 Torr/45°C and 0.05 Torr/100°C

Fittings

Standard: 1/2'' (12.7 mm) tubulation; Optional: 8 VCR® and 8 VCO® female, NW16 KF and NW25 KF,

1.33'' OD CF and 2.75'' OD CF

Compliance

Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and local

government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a trademark

and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. VCR® and VCO® are registered trademarks of

Swagelok® Co., Solon OH. Inconel® is a registered trademark of Inco Alloys International, Inc., Huntington, WV.

629F - 3/19

Dimensional Drawing —

Note: Unless otherwise specified,

dimensions are nominal values in inches

(mm referenced).

Ordering Code Example: 629F01TACJ1B

Code

Configuration

629F

Pressure Range Full Scale

0.02 (not available in 100°C)

U2T

0.05

U5T

0.1

.1T

0.25

RET

01T

02T

11T

21T

100

12T

1000

13T

2000

23T

5000

53T

10000

14T

15000

RBT

20000

24T

25000

RCT

Fittings

1/2'' diameter tubulation

8 VCR® female

1.33'' OD CF

NW16 KF (range < 5000 Torr)

8 VCO® female

2.75'' OD CF

NW25 KF (range < 5000 Torr)

Accuracy

0.12% of Reading (standard on 45°C, 1 thru 25000 Torr)

0.15% of Reading (standard on 45°C, 0.05 Torr, & 0.1 Torr)

0.25% of Reading (standard on 100°C, 1 thru 1000 Torr, 45°C - 0.02 Torr)

0.5% of Reading, (standard on 100°C, <1 Torr)

Temperature

45°C

100°C

Options

Standard Configuration

Optional Heater Status

External Zero (not available on 0.02 Torr 45°C and 0.05 Torr 100°C)

Heater Status and External Zero (not available on 0.02 Torr 45°C

and 0.05 Torr 100°C)

Connector

9 pin Type “D” with Thread Lock (standard)

9 pin Type “D” with Slide Lock (optional)

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel: 978.645.5500

Tel: 800.227.8766 (in U.S.A.)

Web: www.mksinst.com

MKS Instruments, Inc.

Pressure & Vacuum Measurement Solutions

Six Shattuck Road

Andover, MA 01810

Tel: 978.975.2350

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