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D24F Datasheet(PDF) 1 Page - MKS Instruments.

Part # D24F
Description  HEATED (45C) DUAL-RANGE ABSOLUTE BARATRON CAPACITANCE MANOMETER WITH TRIP POINTS
PDF  2 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

D24F Datasheet(HTML) 1 Page - MKS Instruments.

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D24F
HEATED (45°C) DUAL-RANGE ABSOLUTE BARATRON®
CAPACITANCE MANOMETER WITH TRIP POINTS
The D24F dual-range manometer, an application-specific absolute Baratron® capacitance
manometer, is the latest addition to the MKS family of general purpose manometers. With
two distinct measurement outputs, the D24F provides accurate, reliable, and repeatable
pressure measurements for multi-step processes. The D24F is heated to 45°C, and is
available in Full Scale ranges of 10, 100 and 1000 Torr, with a customer specified second
output at 2, 5, or 10 times lower Full Scale. The lower pressure limitation of system A/D
resolution is now minimized with higher output signal levels. The instrument operates with
±15 VDC (±5%) input at 400 mA (max.), and provides two outputs of 0 to 10 VDC linear with
pressure.
The sensor of the D24F exposes only Inconel® to the process permitting the use with
corrosive or dirty gases. Measurements are independent of gas composition. The D24F also
features two trip point relays, each separately adjustable from 0.1 to 100% of Full Scale.
Dual color LEDs indicate relay status. Typical relay uses include pump cross-over and valve
activation. The modern stainless steel enclosure provides a cleanroom compatible product.
Features & Benefits
Accurate
• Second output provides greater
resolution over the lower range of the
instrument—ideal for multi-step
processes
• Percent of Reading accuracy for more
repeatable output signal
• Provides improved sensitivity for system
I/O architecture with limited A/D
resolution
• Measures total pressure directly,
independent of gas composition
Robust
• All Inconel corrosion resistant wetted
surfaces
• Integrated sump (US Patent #5,822,685)
provides particle protection
• High overpressure rating for improved
reliability
Compatible
• Cleanroom-compatible stainless steel
package
• Compatible with earlier Baratron
capacitance manometers, MKS power
supply/readout modules and pressure
controllers


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