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DELTA Datasheet(PDF) 4 Page - MKS Instruments.

Part # DELTA
Description  PROCESS OPTIMIZATION THROUGH PRECISE FLOW RATIO CONTROL
PDF  4 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

DELTA Datasheet(HTML) 4 Page - MKS Instruments.

  DELTA Datasheet HTML 1Page - MKS Instruments. DELTA Datasheet HTML 2Page - MKS Instruments. DELTA Datasheet HTML 3Page - MKS Instruments. DELTA Datasheet HTML 4Page - MKS Instruments.  
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Ordering Information
DELTA II - 7/18
© 2008-2018 MKS Instruments, Inc.
All rights reserved.
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™ and DELTA™ are trademarks of MKS Instruments, Inc., Andover, MA.
Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. DeviceNet™ is a trademark of the Open
DeviceNet Vendor Association, Coral Springs, FL. Inconel® is a registered trademark of Inco Alloys International.
21
Analog PinOuts
9 Pin Type D (not shown)
Pin
Description
1
Valve Open/Close
2
Ratio Signal Output
3
+15 VDC
4
Power Common
5
No connection
6
Ratio Set point
7
Signal Common
8
Signal Common
9
Remote Zero
R
1
Dimensional Drawing —
Note: Dimensions are nominal values
in inches (reference only).
Q
2 = FLOW 2
←
Q
1 = FLOW 1
←
MKS Instruments, Inc.
Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810
Tel:
978.645.5500
Tel:
800.227.8766 (in U.S.A.)
Web: www.mksinst.com
MKS Instruments, Inc.
Flow Solutions
Six Shattuck Road
Andover, MA 01810
Tel:
978.975.2350
DLT2A2
1
Ordering Code Example: DLT2A223163R121
Code
Configuration
DELTA II Flow Ratio Controller
DLT2A2
Channel Flow Ranges (Flow 2/Flow 1) (XX)
500/500
52
1000/1000
13
2000/2000
23
10000/10000
14
For other ranges, Consult Factory
Ratio (Flow 2:Flow1) (Y)
1:1
1
Connector (B)
Analog - 9-pin Type “D” (MKS pinout)
A
DeviceNet - 5 pin microconnector
6
Control I/O (C)
0 to 5 VDC (analog devices)
1
0 to 10 VDC (analog devices)
2
DeviceNet (DeviceNet units must select 3)
3
Control Type (A)
Ratio: Q
2/Q1 or Q1/Q2
R
Percentage: Q
2/(Q1+Q2) or Q1/(Q1+Q2)
P
DeviceNet Units must select R
Control Channel (Z)
Q1 Control: Q
1/Q2 or Q1/(Q1+Q2)
1
Q2 Control: Q
2/Q1 or Q2/(Q1+Q2)
2
Firmware (QQ)
Firmware Revision
21
Unless otherwise specified, MKS will ship firmware revision current to date.



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