P9B

PRESSURE InSEnSITIVE, MUlTI-GaS/MUlTI-RanGE

MaSS FlOw COnTROllER FOR FaST and aCCURaTE

COnTROl OF CRITICal PROCESS GaSES

The MKS, model P9B MFC, is the next generation of MKS pressure insensitive, multi-

gas/multi-range MFC for critical process gas flow control. The device uses the latest in

electronics and valve components enabling it to meet the most critical of process gas flow

control requirements.

The performance capabilities of the P9B are quickly apparent where short process steps

are required given the sub 750 millisecond control times and accuracy to within 1% of set

point. This performance extends over the range of process gases, whether “light” gases

such as helium or “heavy” gases like SF6. The P9B is a true multi-range/multi-gas MFC that

enables the user to have confidence in this device’s capability and minimize MFC inventory

requirements.

Utilization of the multi-gas/multi-range capability is made simple through the device’s

embedded software and standard Ethernet interface that requires no special software, only

a standard web browser and a PC. Already stored on the device are critical gas parameters

for most of the gases in use today by the semiconductor industry. It is a simple matter of

selecting the gas and specifying the range to configure the device. Through this interface the

user can also perform device monitoring diagnostics while the device is operating.

Features & Benefits

Superior Performance

• Fastresponsetosetpointreducesflow

stabilization time for short process steps

and process control

• Tightlycontrolledflowaccuracyof

process gas enables improved chamber

process matching

• Insensitivetoupstreamanddownstream

pressure disturbances

— Accurate flow control without the need

for additional dedicated pressure

regulators

Reduces Overall Costs

• ReducesMFCinventorythroughits

multi-gas/multi-range capability

• Accurateflowcontroloverawide

dynamic range, even when down ranged,

reduces need for an additional low

range MFC

Easy to Integrate and Operate

• Embeddedconfigurationanddiagnostics

software that allows the user to check

MFC functionality without device removal

from the tool

• Usesastandardwebbrowser;nospecial

software required

• Easyviewingofflowrate,gastypeand

Full Scale flow with its bright, self

orienting LED display