Technology Leadership

MKS was the first company to offer an RGA compatible

with modern Ethernet based web-enabled wide area

network installations. Microvision 2 continues this

development to a level that offers the highest flexibility

and connectivity through the use of industry standard

communication hardware and software.

Microvision 2 optimizes the roles required of a complex

sensor by having two dedicated processors;

•

An optimized, proprietary processor for data

acquisition

•

An industry standard CE operating system processor

for external communications through field proven

TCP-IP technology

The advantages of this design approach are fast, accurate

data from a robust RGA sensor using industry standard,

flexible communication protocols. Microvision 2 also

provides a complete range of additional digital and analog

connections for integrated systems at the best possible

value for your investment.

Avoiding the Cost of

the Unknown . . .

Whether your application is leak checking a sputtering

chamber, obtaining the highest vacuum possible in a

synchrotron or precisely controlling a thin film deposition

layer, the cost of not understanding the details of the

gases in your vacuum chamber can be very expensive.

During the last decade residual gas analysis (RGA) has

evolved into a rugged sensor technique, integrated into

automated process control environments to provide vital

information to engineers on errors within the process and

warn when parameters are starting to move out of control.

The constant challenges for RGA technology are to:

•

Provide the highest sensitivity measurements of the

gas species present in a vacuum

•

Have robust sensors that keep working even in harsh

process environments

•

Acquire the highest quality of data at the fastest

possible speeds

•

Integrate seamlessly into the widest possible range

of hardware and software systems

Microvision 2 is the latest innovation in RGA technology

from MKS, designed to meet all of the traditional

requirements for an RGA sensor but with data collection

at speeds unachievable with previous generation

technologies. In addition, the Microvision 2 is designed

to collect data at millisecond speeds per data point even

when measuring data over the full dynamic range of the

RGA. This capability has been achieved without sacrificing

any of the necessary robustness, reliability and support

which have made MKS the world leader in RGA products

over the widest range of applications from semi-conductor

tools or particle accelerators to general industrial

applications.

Microvision 2 RGAs in situ on a latest generation synchrotron storage ring. Images courtesy of Diamond Light Source, UK.

Microvision 2 is the heart of the Vision 2000 series of process

monitoring RGAs