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VISION2000-C Datasheet(PDF) 4 Page - MKS Instruments.

Part # VISION2000-C
Description  RGA FOR CVD AND ETCH PROCESSES
PDF  4 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

VISION2000-C Datasheet(HTML) 4 Page - MKS Instruments.

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Vision 2000-C&E - 2/18
© 2011-2018 MKS Instruments, Inc.
All rights reserved.
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst, Process Eye, Vision 2000-Cand Vision 2000-Eare
trademarks of MKS Instruments, Inc. Microsoft® and Windows® are registered trademarks of Microsoft Corporation. Intel® and
Pentium IV® are registered trademarks of Intel® Corporation. Conflat® is a registered trademark of Varian Vacuum Technolo-
gies. CupraSelect ® is a registered trademark of Schumacher, a member of the Air Products Electronic Chemicals. Kel-F® is a
registered trademark of 3M Company.
Please contact your local MKS office for price and availability information.
Ordering Information
Dimensional Drawing —
Note: Unless otherwise specified, dimensions are nominal values in millimeters.
Typical Installation
UniBlocInlet Valve
MKS Instruments, Inc.
Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810
Tel:
978.645.5500
Tel:
800.227.8766 (in USA)
Web: www.mksinst.com
MKS Instruments, Inc.
Mass Spectrometry
Solutions
3635 Peterson Way
Santa Clara, CA 95054
Tel: 408.750.0300
MKS Instruments, Inc.
Mass Spectrometry
SolutionsS sis
Cowley Way
Crewe, Cheshire CW1 6AG
Tel: +44.1270.250150



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