SM5103
2001-2002
Silicon Microstructures, Inc.
♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100
♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com
Die dimensions in mm
CHARACTERISTICS FOR SM5103 - SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min.
Typ.
Max.
Units
Notes
Excitation Voltage
0
5.0
10.0
V
1
Excitation Current
0
1.5
3.0
mA
1
Span (FS Range)
0.3 PSI
0.8 PSI
1.5 PSI
3.0 PSI
25
25
25
25
50
50
50
50
75
75
75
75
mV
mV
mV
mV
2
Offset
-75
0
25
mV
TC Span
-24
-19
-15.5
%FS/100°C
3
TC Offset
-7
-1
+7
%FS/100°C
3
TC Resistance
24
27.5
33
%/100°C
Linearity
-0.3
+0.1
0.3
%FS
4
Bridge Impedance
2.7
3.3
4.0
k
Ω
Proof Pressure
10X
Rated FS
Burst Pressure
15X
Rated FS
5
Operating Temperature
-40
125
°C
Storage Temperature
-55
150
°C
Notes:
1.
Bridge may be driven with positive or negative excitation as long as Vsub is not connected. SMI does recommend connecting
the Vsub to the highest voltage in the bridge for added offset stability.
2.
Measured at 5V constant voltage excitation.
3.
Measured from 0 to 70 C
4.
Defined as best straight line; 0.3 PSI linearity is
+ 0.5% FS (max).
5.
Burst Pressure is the pressure where the part can survive the overpressure but may degrade over repeated cycles.
Positive
output
for
pressure
applied to the top (circuit) side of
the sensor
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Pressure Ranges
PSI 5103
0.3
003
0.8
008
1.5
015
3.0
030
Gage only.
Custom ranges available
in high volumes
ORDERING INFORMATION:
SM5103 - 003 - G
Model Number
Pressure
range
Pressure
Type
Rev 1.2 8_02
Vsub
+Vexc1
Sig-
+Vexc
-Vexc
-Vexc1
+Vexc1
Sig+
Sig-
0.5
mm
1.0
mm
1.0
mm
0.5
mm
0.5 mm
0.375 mm
0.375 mm
3.4
mm
3.15
mm
SM5103 Die (3.4X3.2 mm as sawn)
Covered under USA Mask-Copyright
See separate Application Notes for typical range of variation in Saw
dimensions.
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