DA767_007.doc

August 30th, 2005

1/4

00000767356

ECN 797

MS767

PRESSURE SENSOR DIE (0-7 BAR)

• 0 to 700 kPa range (7 bar or 102 PSI)

• Absolute pressure sensors

DESCRIPTION

The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted

under vacuum. Implanted resistors make use of the piezo-resistive effect. The MS767 is available as an

absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference

pressure.

FEATURES

•

Uncompensated pressure sensor die

•

Linearity 0.15% (typical)

•

Output Span 392mV @ 5V

•

Die Size 1.72 x 1.58mm

•

Temperature Range -40°…+125°C

•

Low Cost, High reliability

APPLICATION

•

For absolute pressure sensor systems

•

Tire pressure measurements

•

Electronic scales

ELECTRICAL CONNECTIONS

Positive output for pressure applied topside

the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).

Vs+ : Supply voltage of Wheatstone bridge

Epi : Connection of epitaxial layer (membrane)

Out- : Negative output

Out+ : Positive output

GND1 : Ground

GND2 : Ground

Vs+

GND2

GND1

Out+

EPI

Out-