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PRO165LM SPECIFICATIONS

Electrical Specifications

Drive System

Brushless Linear Servomotor

Feedback

Non-contact Linear Encoder

-E1: 1 Vpp, 20 µm signal period

-E2: Digital RS422, 0.1 µm electrical resolution

Maximum Bus Voltage

340 VDC

Limit Switches

5 V, Normally-Closed

Home Switch

Near Center

Notes:

1. Certified with -PL1/-PL2 option.

2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

3. Axis-orientation for on-axis loading is listed.

4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent.

Contact factory for multi-axis applications.

Mechanical Specifications

PRO165LM

Travel

100

150

200

300

400

500

600

Accuracy(1)

Standard

±4 µm

±6 µm

±8 µm

±10 µm

±12 µm

±14 µm

±15.5 µm

Calibrated

±1 µm

±1 µm

±1.5 µm

±1.5 µm

±1.5 µm

±2 µm

±2 µm

Resolution (Min.

Incremental Motion)

5 nm (-E1 Encoder)

Bidirectional

Repeatability(1)

±0.4 µm

±0.4 µm

±0.5 µm

±0.5 µm

±0.5 µm

±0.5 µm

±0.5 µm

Horizontal Straightness(1)

±2.5 µm

±3 µm

±4 µm

±6 µm

±8 µm

±9 µm

±10 µm

Vertical Straightness(1)

±2.5 µm

±3 µm

±4 µm

±6 µm

±8 µm

±9 µm

±10 µm

Pitch

29 µrad

29 µrad

40 µrad

58 µrad

70 µrad

80 µrad

90 µrad

Roll

29 µrad

29 µrad

40 µrad

58 µrad

70 µrad

80 µrad

90 µrad

Yaw

29 µrad

29 µrad

40 µrad

58 µrad

70 µrad

80 µrad

90 µrad

Maximum Speed(2)

2 m/s

Maximum Acceleration(2)

3 g

Maximum Force,

Continuous

77.7 N

Load

Capacity(3)

Horizontal

45 kg

Side

45 kg

Moving Mass

2.6 kg

Stage Mass

8.2 kg

9.1 kg

9.9 kg

11.6 kg

13.3 kg

14.9 kg

16.6 kg

Material

Anodized Aluminum

MTBF (Mean Time

Between Failure)

20,000 Hours