aerotech.com

PRO165SL SPECIFICATIONS

Electrical Specifications

Drive System

Brushless Linear Servomotor

Feedback (Rotary Encoder)(1)

Incremental – 1000 lines/rev (1 Vpp) and 2500 lines/rev (TTL)

Maximum Bus Voltage

340 VDC

Limit Switches

5 V, Normally-Closed

Notes:

1. Certified with -PL1/PL2 options.

2. Achieved with Aerotech rotary motor with amplified sine encoder.

3. Achieved with Aerotech rotary motor with 2500 cnts/rev digital encoder.

4. Requires the selection of an appropriate amplifier with sufficient voltage and current.

5. Axis-orientation for on-axis loading is listed.

6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent.

Contact factory for multi-axis applications.

7. Specifications listed are non-foldback kit options. Contact factory for specifications when a foldback kit (-FBx) is used.

Mechanical Specifications

PRO165SL

Travel

100

150

200

300

400

Accuracy(1)

Standard

±6 µm

±8 µm

±8 µm

±10 µm

±12 µm

Calibrated

±1.25 µm

±1.5 µm

±1.75 µm

±2.5 µm

±3 µm

Resolution (Min. Incremental Motion)

0.1 µm(2); 1.0 µm(3)

Bidirectional Repeatability(1)

±1 µm

±1 µm

±1 µm

±1 µm

±1 µm

Horizontal Straightness(1)

±2.5 µm

±3 µm

±4 µm

±6 µm

±8 µm

Vertical Straightness(1)

±2.5 µm

±3 µm

±4 µm

±6 µm

±8 µm

Pitch

29 µrad

29 µrad

39 µrad

58 µrad

70 µrad

Roll

29 µrad

29 µrad

39 µrad

58 µrad

70 µrad

Yaw

29 µrad

29 µrad

39 µrad

58 µrad

70 µrad

Maximum Speed(4)

300 mm/s

Maximum Acceleration(4)

Function of Motor, Amplifier Selection, Payload, and Maximum Axial Load

Load Capacity(5)

Horizontal

45 kg

Vertical

(Axial)

25 kg

Side

45 kg

Moving Mass

(w/ Tabletop)

2.3 kg

Stage Mass

(No Motor)

6.1 kg

6.6 kg

7.1 kg

8.1 kg

9.1 kg

Material

Anodized Aluminum

MTBF (Mean Time Between Failure)

20,000 Hours

1. Requires the selection of a motor option.