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PRO190LM SPECIFICATIONS

Electrical Specifications

Drive System

Brushless Linear Servomotor

Feedback

Non-contact Linear Encoder

-E1: 1 Vpp, 20 µm signal period

-E2: Digital RS422, 0.1 µm electrical resolution

Maximum Bus Voltage

340 VDC

Limit Switches

5 V, Normally-Closed

Home Switch

Near Center

Notes:

1. Certified with -PL1/-PL2 option.

2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

3. Axis-orientation for on-axis loading is listed.

4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent.

Contact factory for multi-axis applications.

Mechanical Specifications

PRO190LM

Travel

100

150

200

300

400

500

600

Accuracy(1)

Standard

±4 µm

±6 µm

±8 µm

±10 µm

±12 µm

±14 µm

±15.5 µm

Calibrated

±1 µm

Resolution (Min.

Incremental Motion)

5 nm (-E1 Encoder)

Bidirectional

Repeatability(1)

±0.3 µm

±0.4 µm

±0.4 µm

±0.4 µm

±0.4 µm

±0.4 µm

±0.4 µm

Horizonal Straightness(1)

±1.5 µm

±2 µm

±2.5 µm

±3.5 µm

±4.5 µm

±5.5 µm

±6.5 µm

Vertical Straightness(1)

±1.5 µm

±2 µm

±2.5 µm

±3.5 µm

±4.5 µm

±5.5 µm

±6.5 µm

Pitch

27 µrad

29 µrad

40 µrad

50 µrad

60 µrad

70 µrad

80 µrad

Roll

27 µrad

29 µrad

40 µrad

50 µrad

60 µrad

70 µrad

80 µrad

Yaw

27 µrad

29 µrad

40 µrad

50 µrad

60 µrad

70 µrad

80 µrad

Maximum Speed(2)

2 m/s

Maximum

Acceleration(2)

3 g

Maximum Force,

Continuous

106.7 N – Standard

154.7 – With Air Cooling (20 psig)

Load

Capacity(3)

Horizontal

60 kg

Side

60 kg

Moving Mass

4.5 kg

Stage Mass

14.4 kg

15.6 kg

16.8 kg

19.3 kg

21.7 kg

24.2 kg

26.6 kg

Material

Anodized Aluminum

MTBF (Mean Time

Between Failure)

20,000 Hours