More Flexibility

• 2D and 3D contouring

- Measurement of spherical, aspheric and

cylindrical shapes (Application example:

precision opticalcomponent measurement)

- Scanning or point-to-point motion profiles

- Available in multiple configurations

• Generic high-speed electrical interface

between the motion and sensor controller

• Open architecture software to integrate a

large variety of sensors such as white light

or multi-wavelength interferometers, camera

systems or capacitive probes

• Easy-to-use, advanced motion algorithms

ease motion profile generation

Higher Precision

• Axis repeatability in the low nanometer range

• Nanometer-level minimum incremental motion

(resolution)

• Ultra-smooth motion even at very low velocities

Reduced Processing Time

• Save up to 40% of measurement time compared

with conventional Cartesian systems

• Real-time communication between motion and

sensor controller provides synchronization of

measurement and position data

• Fast data access during the measurement and

intelligent data management

Minimal Footprint

• 60% footprint savings compared to Cartesian

systems

Advance to the next level of surface measurement technology by utilizing Aerotech’s

Surface

Measurement Motion Platform (SMP). The SMP is a complete multi-axis motion system that is

specifically designed to provide an ideal motion platform for surface measurement applications.

The SMP is optimized to provide more flexibility in 2D and 3D contouring, higher precision with

nanometer resolution, significantly reduced processing time and minimal footprint.

Aerotech’s Surface Measurement Platform

SMP Benefits

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