5

sensing.honeywell.com

±50 SCCM to ±750 SCCM

CAUTION

IMPROPER USE

Do not use these products to sense liquid flow

Failure to comply with these instructions may result in

product damage.

Table 1. Absolute Maximum Ratings1

Characteristic

Parameter

Supply voltage

-0.3 Vdc to 6.0 Vdc

Voltage on I/O output pin

-0.3 Vdc to Vsupply

Storage temperature range

-40 °C to 125 °C [-40 °F to 257 °F]

Maximum flow change

5.0 SLPM/s

Maximum common mode pressure

25 psi at 25 °C [77 °F]

Maximum flow

10 SLPM

1

Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical

characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at

absolute maximum ratings.

CAUTION

PRODUCT DAMAGE

Do not disassemble these products.

Failure to comply with these instructions may result in

product damage.

Table 2. Operating Specifications

Characteristic

Parameter

Note

Supply voltage

3.3 Vdc

5.0 Vdc

3.3 Vdc ±10%

5.0 Vdc ±10%

–

Power:

3.3 Vdc

5.0 Vdc

40 mW max.

65 mW max.

1

Compensated temperature range

0 °C to 50 °C [32 °F to 122 °F]

2

Operating temperature range

-20 °C to 70 °C [-4 °F to 158 °F]

Accuracy

See Table 3.

3, 4

Total Error Band (TEB)

See Table 3.

4, 5

Null accuracy

±0.1 %FSS

4, 6

Response time

1 ms typ.

7

Resolution

12 bit

–

Warm-up time

15 ms

8

Calibration media

gaseous nitrogen

9

Null stability

±0.06 %FSS max. deviation from null output after 1000 hrs at 25 °C

–

Reverse polarity protection

no

–

1

Maximum power: Is measured under the conditions of the highest supply voltage, Vsupply + 10%, 70 °C, full scale flow and with the minimum load specified for

that supply voltage.

2

Custom and extended compensated temperature ranges are possible. Contact Honeywell for details.

3

Accuracy: The maximum deviation from the nominal output over the compensated flow range at a reference temperature of 25

°C. Errors include offset, span,

non-linearity, hysteresis and non-repeatability.

4

Full Scale Span (FSS): The algebraic difference between the output at the forward Full Scale (FS) flow and the output at the reverse FS flow. Forward flow is

defined as flow from P1 to P2 as shown in Figure 9. The references to mass flow (SCCM) refer to gas flows at the standard conditions of 0 °C and atmospheric

pressure 760 (101.3 kPa).

5

Total Error Band: The maximum deviation in output from the ideal transfer function over the entire compensated temperature and flow range. Includes all errors

due to offset, full scale span, flow hysteresis, flow repeatability, thermal effect on offset, thermal effect on span and thermal hysteresis.

6

Null accuracy: The maximum deviation in output at 0 SCCM from the ideal transfer function over the compensated temperature range. This includes offset

errors, thermal airflow hysteresis and repeatability errors.

7

Response time: The time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected

by the pneumatic interface).

8

Warm-up time: The time to the first valid flow measurement after power is applied.

9

Default calibration media is dry nitrogen gas. Please contact Honeywell for other calibration options.