DA765_000.doc

March 19, 2009

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000007651507

ECN 1186

MS765

PRESSURE SENSOR DIE (0-0.5 BAR)

• 0 to 50 kPa range (0.5 bar or 7.25 PSI)

• Absolute/differential pressure sensors

• Medical/industrial applications

• RoHS-compatible & Pb-free

1

DESCRIPTION

The sensor element of the MS765 consists of a silicon micro-machined membrane. Implanted resistors make

use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This

sensor, which has outstanding span values, is available in various configurations. The absolute pressure sensor

employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this

sealing has a thickness of 0.2 mm (MS765-A_0.2) or 0.5 mm (MS765-A_0.5). There are two gauge versions

available: one with a drilled Pyrex glass (MS765-D) and the other without Pyrex glass (MS765-S).

FEATURES

•

Uncompensated pressure sensor die

•

Linearity 0.05% (typical)

•

Output Span 170 mV @ 500 mbar & 5V

•

Small Die Size 1.96 x 2.10 mm (MS765-A)

•

Temperature Range -40°…+125°C

•

Low Cost, High reliability

APPLICATION

•

Absolute/Differential pressure sensor systems

•

Blood pressure meters

•

Variometers

•

Industrial applications

•

Liquid level control

ELECTRICAL CONNECTIONS

Positive output for pressure applied topside

bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers

(PBDE).

Vs+ : Supply voltage of Wheatstone bridge

Epi : Connection of epitaxial layer (membrane)

Out- : Negative output

Out+ : Positive output

GND1 : Ground

GND2 : Ground

Vs+

GND2

GND1

Out+

EPI

Out-