DA7905_002.doc

May 6, 2009

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000079051052

ECN 1186

MS7905

PRESSURE SENSOR DIE (0-5 BAR)

• 0 to 500 kPa range (5 bar or 73 PSI)

• Absolute/differential pressure sensors

• High linearity, small size

• High overpressure capability (18 bar)

• RoHS-compatible & Pb-free

1

DESCRIPTION

The sensor element of the MS7905 consists of a silicon micro-machined membrane. Implanted resistors make

use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This

sensor, which has outstanding linearity and span values, is available in various configurations. The absolute

pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer

used for this sealing has a thickness of 0.2 mm (MS7905-A_0.2) or 0.5 mm (MS7905-A_0.5). Two gauge

versions are available: one with a drilled Pyrex glass (MS7905-D) and the other without Pyrex glass (MS7905-S).

FEATURES

•

Uncompensated pressure sensor die

•

Linearity 0.05% (typical)

•

Output span 150mV @ 5V

•

Very small die size 1.72 x 1.58 mm (MS7905-A)

•

Temperature range -40°…+125°C

•

Low cost, high reliability

APPLICATION

•

Absolute pressure sensor systems

•

Engine controls

•

Differential/gauge pressure sensor systems

•

Dive computers

ELECTRICAL CONNECTIONS

Positive output for pressure applied topside

bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers

(PBDE).

Vs+ : Supply voltage of Wheatstone bridge

Epi : Connection of epitaxial layer (membrane)

Out- : Negative output

Out+ : Positive output

GND1 : Ground

GND2 : Ground

Vs+

GND2

GND1

Out+

EPI

Out-