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MS79005 Datasheet(PDF) 4 Page - Intersema Sensoric SA

Part # MS79005
Description  PRESSURE SENSOR DIE (0-0.5 BAR)
PDF  5 Pages
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Manufacturer  INTERSEMA [Intersema Sensoric SA]
Direct Link  http://www.meas-spec.com/
Logo INTERSEMA - Intersema Sensoric SA

MS79005 Datasheet(HTML) 4 Page - Intersema Sensoric SA

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DA79005_000.doc
May 07, 2009
4/5
000790051447
ECN 1186
ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )
Parameter
Min
Typ
Max
Unit
Notes
Operating Pressure Range
0
0.5
Bar
Operating Temperature Range
-40
125
°C
Bridge Resistance
3.0
3.4
3.8
KΩ
1
Full-scale span (FS)
120
150
180
mV
Zero Pressure Offset
-40
0
40
mV
Linearity
± 0.05
± 0.2
% FS
2
Temperature Coefficient of Resistance
Span
Offset
+ 2400
- 1500
- 80
+ 2800
- 1900
+ 3300
- 2300
+ 80
ppm/°C
ppm/°C
µV/°C
3, 1
Pressure Hysteresis
± 0.05
± 0.15
% FS
4
Repeatability
± 0.05
± 0.15
% FS
5
Temperature Hysteresis
0.3
% FS
6
NOTES
1) Reference Resistors R5 and R6 have the same specifications as the bridge resistances.
2) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 0.5 bar).
3) Slope of the endpoint straight line from 25°C to 60°C.
4) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
5) Same as 4) after 10 pressure cycles
6) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
PICKING TOOLS
The MS79005 sensors have a sensitive membrane size of 0.74 x 0.74 mm and outer dimensions of
1.78 x 1.78 mm (MS79005-A_0.2, MS79005-A_0.5 and MS79005-D) and 1.81 x 1.81 mm (MS79005-S). The
pick and place tool has to be of a soft material such as rubber (Hardness 78-97 Shore A). Its external size must
fit the sensor and the vacuum cavity must be as large as the membrane itself. Successful tests have been made
with specific SPT tools, see SPT drawing and references below.
Ensure that the ejection pins do not touch the membrane for gauge versions.
SPT references
RTR-A1-060x060
External dimension
TL & TW: 0.06 inch /1.52 mm
Internal dimensions
∅
H: 0.035 inch / 0.89 mm



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