KXR94 Series

Accelerometers and Inclinometers

Small Package - 5x5x1.2mm DFN

Multiplexed Analog or Digital SPI Interface

Internal 1KHz Low Pass Filter

Low Noise

Lead-free Solderability

Excellent Temperature Performance

High Shock Survivability

Low Power Consumption

User Definable Bandwidth

Factory Programmable Offset and Sensitivity

Self-test Function

FEATURES

“Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided

in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.

No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product

specifications or discontinue this product at any time without prior notice.

© Kionix 2012 All Rights Reserved

January 26, 2012 Rev. 2.3

Page 1 of 2

These high-performance silicon micromachined linear accelerometers and

inclinometers consist of a sensor element and an ASIC packaged in a

5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from

single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE)

processes, and is protected from the environment by a hermetically-sealed

silicon cap at the wafer level.

integrated temperature compensation that provides excellent performance

over temperature. These sensors can accept supply voltages between 2.5V

and 5.25V. Sensitivity is factory programmable allowing customization for

applications requiring from ±1.0g to ±4.0g ranges. Sensor bandwidth is

user-definable.

The sensor element functions on the principle of differential capacitance.

Acceleration causes displacement of a silicon structure resulting in a

change in capacitance. An ASIC, using a standard CMOS manufacturing

process, detects and transforms changes in capacitance into an analog out-

put voltage, which is proportional to acceleration. The sense element de-

sign utilizes common mode cancellation to decrease errors from process

variation and environmental stress. Available in analog and multiplexed

analog outputs and serial peripheral interface (SPI).

PROPRIETARY TECHNOLOGY

36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com

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