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FS1012 Datasheet(PDF) 4 Page - Integrated Device Technology

Part # FS1012
Description  Gas and Liquid Flow Sensor Module
PDF  6 Pages
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Manufacturer  IDT [Integrated Device Technology]
Direct Link  http://www.idt.com
Logo IDT - Integrated Device Technology

FS1012 Datasheet(HTML) 4 Page - Integrated Device Technology

  FS1012 Datasheet HTML 1Page - Integrated Device Technology FS1012 Datasheet HTML 2Page - Integrated Device Technology FS1012 Datasheet HTML 3Page - Integrated Device Technology FS1012 Datasheet HTML 4Page - Integrated Device Technology FS1012 Datasheet HTML 5Page - Integrated Device Technology FS1012 Datasheet HTML 6Page - Integrated Device Technology  
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FS1012 Datasheet
© 2017 Integrated Device Technology, Inc.
4
July 20, 2017
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
Standard Gas Flow Range[b], [c]
Gas Flow
FS1012-1020-NG
0
2
(2000)
SLPM
(SCCM)
FS1012-1100-NG
0
10
(10000)
SLPM
(SCCM)
Standard Liquid Flow Range[b], [c]
Liquid Flow
FS1012-1001-LQ
0
0.5
(500)
SLPM
(SCCM)
FS1012-1002-LQ
0
1.0
(1000)
SLPM
(SCCM)
[a] Sensor specifications are tested at the wafer die level.
[b] SLPM: Standard liter per minute.
[c] SCCM: Standard cubic centimeter per minute.



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