FS2012 datasheet(5/9 Pages) IDT

5 / 9 page

FS2012 Series Datasheet

July 19, 2017

5. Electrical Characteristics

Table 4.

Electrical Characteristics

Note: See important notes at the end of the table.

Symbol

Parameter

Conditions

Minimum

Typical

Maximum

Units

IVIN

Current Consumption

Gas Flow[a], [c], [d]

Nitrogen (N2) at Temperature = 23.5 ± 1.5°C

FNG

Gas Flow Range

FS2012-1020-NG

(2000)

SLPM

(SCCM)

FS2012-1100-NG

(10000)

SLPM

(SCCM)

ENG

Flow Accuracy

FS2012-1020-NG; 0.1 to 2 SLPM

±1

±4

% Reading

FS2012-1100-NG; 0.5 to 10 SLPM

VOUT_ANG

Analog Voltage Output

–

OFFZERO_NG

Analog Zero Offset

0.003

0.005

Liquid Flow[a], [b], [c], [d]

DI Water at Temperature = 23.5 ± 1.5°C

FLQ

Liquid Flow

FS2012-1001-LQ

0.5

(500)

SLPM

(SCCM)

FS2012-1002-LQ

1.0

(1000)

SLPM

(SCCM)

ELQ

Flow Accuracy

FS2012-1001-LQ; 20 to 450 SCCM

±2.5

±7

% Reading

FS2012-1002-LQ; 20 to 800 SCCM

VOUT_ALQ

Analog Voltage Output

—

OFFZERO_LQ

Zero Offset

0.003

0.005

[a] Direction of flow is from P1 In to P2 Out.

[b] Board circuitry is not protected from liquids.

[c] SLPM: Standard liter per minute.

[d] SCCM: Standard cubic centimeter per minute.

FS2012 Datasheet(PDF) 5 Page - Integrated Device Technology

FS2012 Datasheet(HTML) 5 Page - Integrated Device Technology

Html Pages

1 2 3 4 5 6 7 8 9

Datasheet Download

Link URL