DM48513 datasheet(12/20 Pages) ACCRETECH

12 / 20 page

Name

Model

External view

Orthogonal axis adjustment

(mm)

Swivel adjust-

ment

Tilt adjust-

ment

Table size

(mm)

Allowable load

(net wt.) (kg)

Remarks

Fine Coarse Fine Coarse

Adjustment stand

E-AT-S01D

8°

360°

Φ 150

(7)

• Min. reading

increment 10 μm

Leveling

adjustment stand

E-AT-S02A

±1.5°

80 × 110

(3)

Adjustment stand

E-AT-S03A

±2.5

±2°

80 × 58

(0.9)

• For E-RM-S75A

E-AT-S04A

±8

±3°

80 × 125

(8)

E-AT-S05A

±3

±1°

120 × 58

(1.4)

• For E-RM-S76A

E-AT-S36A

±3

±1°

200 × 120

(4.5)

• For E-RM-S77A

X-direction

movement

adjustment stand

E-AT-S08A

400

150 × 150

(25)

3D fine

adjustment stand

E-AT-S10B

75 × 40

(3.4)

• Straightness: 0.03 mm

1-axis precision

fine adjustment stand E-AT-S11B

125 × 150

(4.9)

• Straightness: 3 μm

• Min. reading value:

10 μm

Swivel fine

rotation stand

E-AT-S12A

±5°

360°

Φ 90

(0.58)

• Min. reading value: 5’

1-axis ultra precision

fine adjustment stand E-AT-S13B

60 × 60

(0.7)

• Straightness: 3 μm

• Min. reading value:

0.5 μm

Tilting stand

E-AT-S64B

±20°

60 × 120

(1)

• Min. reading value: 5’

Universal stand

E-WJ-S03A

360°

±90°

Φ 110

(2.5)

• X/Y-direction

adjustment

Column rotary spacer

E-CS-S31A*1

H:100

360°

─

• Inserted between

table and column

E-CS-S76A*3

Column spacer

E-CS-S32A*1

H:200

• Inserted between

table and column

E-CS-S77A*3

Tracing driver spacer E-CS-S33A*1

L : 70

• Inserted between

column and tracing

driver

Tracing driver tilting

device

E-CA-S24A*2

E-CA-S85A*3

E-CA-S92A*3

±15°

─

• For contour measurements

E-CA-S85A:

For tracing driver 100 mm

E-CA-S92A:

For tracing driver 200 mm

E-CA-S32A*2

±5°

─

(5)

• For roughness

measurements

E-CA-S101A*3

Standard Inventory Parts

*1: Cannot be used with S3000A Series and S5000 Series.

*2: Cannot be used for Linear Series and S3000A and S5000 Series. For S1400D,S1800D,S2800E,C1600D,C2600E.

*3: For Linear Series and S1400G, C1600G, S1800G, C2600G, S2800G and S2800G Series.

Coarse

movement:

10 μm

Fine movement:

0.5 μm)

Adjustment Devices

Applicable models

S480

S1400

S1500

S2000

S5000

C1600

S1800

C1700/C1710

S1900/S1910

S2000

C2600

S2800

C2700

S2900

S-NEX

Surface Texture – Contour

Measuring Instruments

SURFCOM · CONTOURECORD Option

TOKYO SEIMITSU

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