Automatic Dicing Saw

DAD3221/3231

5% Reduced Cutting Time Compared to Conventional Equipment

By improving the return speed of each processing axis (X, Y, and Z) and employing a

high-speed communication method, the processing time of DAD3221 and DAD3231 has

been reduced by 5% compared to conventional equipment.

• Use clean, oil-free air (dew point between -10 to -20 , residual oil: 0.1 ppm, and filtration rating: 0.01μm/ 99.5% or more).

• Keep room temperature fluctuations within ±1℃ of the set value. (Set value should be between 20 and 25ºC).

• Keep cutting water and cleaning water 2ºC above room temperature (fluctuations within ±1ºC ).

• The machine should be used in an environment free from external vibration. Do not install the machine near a ventilation opening, heat-generating equipment, or oil mist generating parts.

• This machine uses water. In case of water leakage, please install the machine on a floor with sufficient waterproofing and drainage treatments.

* All pressures specified above are gauge pressures.

* The above specification may change due to technical modifications. Please confirm when placing your order.

* For further information, please contact your local DISCO sales representative.

Specifications

www.disco.co.jp

90

95

100

105

110

115

120

125

130

135

140

従来機

DAD3220/DAD3230

DAD3221/DAD3231

Processing time reduced by 5%

Conventional:

DAD3220/DAD3230

DAD3221/DAD3231

Measurement conditions

・Processed workpiece: ø6-inch silicon wafers

・Cutting speed: 100 mm/sec

・Index: 5 mm (CH1 & CH2)

・Alignment operation used

Unit

DAD3221

ø6″

ø8″(Option)

Cutting range

mm

160

Cutting speed

mm/s

Cutting range

mm

210

Index step

mm

Index positioning

accuracy

mm

0.002/210

(Single error) 0.002/5

Max. stroke

mm

Moving resolution

mm

Repeatability accuracy

mm

θ-axis

Max. rotatingangle

deg

Layout

-

Rated output

kW

1.8 at 60,000min

-1

Rated torque

N・m

0.29

Revolution speed

range

min

-1

6,000 - 60,000

mm

490 × 870 × 1,670

kg

420

Special Spec)

(Square die 8 inch Special Spec)

Workpiece size

-

32.2 (ø2"blades)

X-axis

Y-axis

210

0.0001

0.005/160

(Single error) 0.003/5

0.1 - 800

160

Machine dimensions

Machine weight

550

Single

0.00002

650 × 950 × 1,670

0.001

320

0.48

Z-axis

2.0 at 40,000 min

‐1

3,000 - 40,000

Specification

DAD3231

Spindle

2017.12