600 datasheet(15/16 Pages) MKS

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629F and E29F

629F

11T

Configuration

Ordering Code Example: 629F11TBCJ4B

Code

Example

Absolute Capacitance Manometers

9-pin D-connector, standard sensor

629F

9-pin D-connector, etch sensor

E29F

Pressure Ranges Full Scale (Torr)

0.02 (available on 45oC models only)

U2T

0.05

U5T

0.10

.1T

0.25

RET

01T

02T

11T

21T

100

12T

1000 (available on 629D only)

13T

Fittings

1/2” OD (12.7 mm) tubulation

Swagelok 8 VCR, female

1.33” OD Conflat, rotatable1

NW16-KF2

Swagelok 8 VCO, female (629D only)

Accuracy (% of Reading)

0.12% (45oC products in 1 Torr range and higher)

0.15% (45oC products in 0.25, 0.10, 0.05 Torr ranges)

0.25% (100oC products 1 Torr range or higher, and 0.02 Torr 45oC products)

0.50% (100oC products in 0.25, 0.10, 0.05 Torr ranges)

Sensor Temperature

45oC

100oC

Options

Standard configuration, vertical calibration

Heater status indication, vertical calibration

External zero, vertical cal (N/A for 0.02 Torr or 100oC/0.05 Torr products

Heater status, external zero, vertical cal

(N/A for 0.02 Torr or 100oC/0.05 Torr products)

Standard configuration, horizontal calibration (< 1 Torr only)

Heater status indication, horizontal calibration (< 1 Torr only)

External zero, horizontal cal (45oC products with 0.05, 0.10, 0.25 Torr ranges;

100oC products with 0.10 and 0.25 Torr ranges)

Heater status, external zero, horizontal cal

(45oC products with 0.05, 0.10, 0.25 Torr ranges;

100oC products with 0.10 and 0.25 Torr ranges)

Connector

9-pin D-connector, thread locks

9-pin D-connector, slide locks

Ordering Information

600 Datasheet(PDF) 15 Page - MKS Instruments.

600 Datasheet(HTML) 15 Page - MKS Instruments.

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