628F datasheet(2/2 Pages) MKS

2 / 2 page

Specifications and

Ordering Information

Full Scale Ranges

0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15000, 20000, 25000 Torr

Resolution

0.001% of Full Scale (0.002% of Full Scale for 0.05 Torr)

Accuracy

0.25% of Reading (including non-linearity, hysteresis, and non-repeatability) for 1 - 25,000

Torr;

0.50% of Reading for 0.25, 0.1, and 0.05 Torr

Temperature Coefficients

Zero

0.002% of Full Scale/°C for 1 - 25,000 Torr; 0.01% of Full Scale/°C for 0.25 and 0.1 Torr;

and 0.02% of Full Scale/°C for 0.05 Torr

Span

0.02% of Reading/°C

Ambient Operating Temperature

15°C to 50°C

Volume

6.3 cc

Warm-Up Time

2 hours for 1 - 25,000 Torr ranges, 4 hours for ranges < 1 Torr

Overpressure Limit

45 psia (310 kPa) or 120% Full Scale, whichever is greater

Materials Exposed to Gases

Inconel®

Input Power Required

±15 VDC ±5% @ 0.6 Amps (max.)

Output Signal

Pressure: 0 to +10 VDC into >10K

Ω load

Optional Features LED’s and Switches

Temperature status: one semiconductor switch will turn “ON” and corresponding green LED

will be “ON” when the instrument is at temperature.

Heater status: second semiconductor switch will turn “OFF” when heater failure occurs and

corresponding bi-color LED will be blinking red, otherwise light will remain green.

Fittings

Standard: 1/2'' (12.7 mm) OD tube. Optional: 8 VCR® and 8 VCO® female, NW16 KF and

NW25 KF, 1.33'' OD CF and 2.75'' OD CF

Compliance

Specifications for Semiconductor Switch

Current Charge Capacity

120mA max.

Switch on Resistance

Ω max. @ 120mA, 50°C

Open Circuit Voltage

28V max.

Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and

local government export licenses under ECCN 2B230. Specifications are subject to change without notice. mksinst™ is a

trademark and Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA. VCR® is a registered trademark

of Swagelok® Co., Solon OH. Inconel® is a registered trademark of Inco Alloys International, Inc., Huntington, WV.

628F - 3/19

Dimensional Drawing —

Note: Unless otherwise specified,

dimensions are nominal values in inches

(mm referenced).

628F

01T

Ordering Code Example: 628F01TBE1B

Code

Configuration

628F

Pressure Range Full Scale

0.05

U5T

0.1

.1T

0.25

RET

01T

02T

11T

21T

100

12T

1000

13T

2000

23T

5000

53T

10000

14T

15000

RBT

20000

24T

25000

RCT

Fittings

1/2'' (12.7 mm) OD tube

8 VCR female

1.33'' OD CF

NW16 KF (range < 5000 Torr)

8 VCO female

2.75'' OD CF

NW25 KF (range < 5000 Torr)

Accuracy

0.25% of Reading (ranges

≥ 1 Torr)

0.5% of Reading (ranges < 1 Torr)

Options

Standard Configuration, vertical calibration

Optional Temperature/Heater Status, vertical calibration

Standard Configuration, horizontal calibration

(ranges < 1 Torr only)

Optional Temperature/Heater Status, horizontal calibration

(ranges < 1 Torr only)

Connector

15 pin Type “D” with Thread Lock

15 pin Type “D” with Slide Lock

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel: 978.645.5500

Tel: 800.227.8766 (in U.S.A.)

Web: www.mksinst.com

MKS Instruments, Inc.

Pressure & Vacuum Measurement Solutions

Six Shattuck Road

Andover, MA 01810

Tel: 978.975.2350

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