628F

HEATED (100°C) ABSOLUTE BARATRON

MANOMETER

accuracy. The 628F Baratron capacitance manometer is heated to 100°C, accurate to

0.25% of Reading and includes updated temperature control electronics to provide superior

long-term stability and repeatability. Optional heater and temperature status LED/switches

indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This

capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to

accommodate today’s lower process pressures.

Based on established Baratron capacitance manometer technology, the sensor’s wetted

steel package provides a cleanroom-compatible product. The product is interchangeable with

earlier 128 and 628 Baratron capacitance manometers and can be used with MKS power

supplies, display units and pressure controllers, or the user’s compatible power supply/

readout devices.

Features & Benefits

Accurate

• Excellent long-term stability

• Percent of Reading accuracy for more

precise output signal in lower pressure

ranges

• Full Scale ranges low as 50 mTorr

(0.07 mbar) for precise measurement of

low pressure processes

• Measures total pressure directly,

independent of gas composition

Robust

• All-Inconel corrosion-resistant wetted

surfaces

• Integrated sump (US patent #5,822,685)

provides particle protection

• Faster warm-up time

• Visual and electrical status of

temperature and heater control circuit

• High overpressure rating for improved

reliability

Compatible

• Cleanroom-compatible stainless steel

package

• Compatible with earlier Baratron

capacitance manometers, MKS power

supply/readout modules, and pressure

controllers