Full Scale Measurement Ranges

0.1, 0.25, 1, 2, 10, 20, 100, 200, 500, and 1000 Torr (and metric equivalents)

Sensor Temperatures

45°, 80°, or 100°C

Accuracy (includes non-linearity, hysteresis,

and non-repeatability)

45°C Models

0.10% Reading for 1 - 1000 Torr, 0.12% Reading for < 1 Torr

80° and 100°C Models

0.20% Reading for 1 - 1000 Torr, 0.40% Reading for < 1 Torr

Resolution

0.002% Full Scale

1

Zero Temperature Coefficients

45°C Models

0.002% Full Scale/°C for 1 - 1000 Torr, 0.005% Full Scale/°C for < 1 Torr

80° and 100°C Models

0.002% Full Scale/°C for 1 - 1000 Torr, 0.01% Full Scale/°C for < 1 Torr

Span Temperature Coefficient

0.02% Reading/°C

Time Constant (

< 20 ms for

≥ 1 Torr; < 40 ms for < 1 Torr

Ambient Operating Temperature

45°C Models

15° to 40°C

80° and 100°C Models

15° to 50°C

Internal Sensor Volume

Warmup Time

2 hours for 1 – 1000 Torr models, 3 hours for < 1 Torr versions

Overpressure Limit

45 psia

Sensor Type

Standard or MKS patented etch baffle

Materials Exposed to Process Gases

Inconel and Incoloy nickel alloys.

Some optional fittings are made from 300 series stainless steel.

Input Power Required

45°C Models

±15 VDC (±5%) @ 0.40 amps (max) or +24 VDC ±10% @ 11 watts (max)

80° and 100°C Models

±15 VDC (±5%) @ 0.60 amps (max) or +24 VDC ±10% @ 22 watts (max)

Output Signal

Analog

0 - 10 VDC into > 10 k

Ω load

Trip Relay Option

Two (2) internally mounted process pressure trip relays, solid state, independently

adjustable by customer at atmospheric pressure from 0.5% to 100% of Full Scale

range. Relay capacity of 0.20 amps@ 30 VDC. Complies with UL1577 requirements.

Electrical Connector

15-pin D-subminiature. All pin assignments are identical to legacy Baratron

analog capacitance manometers (and many competitive products) for direct

retrofit into existing systems.

Fittings

Standard

½'' (12.7 mm) O.D. tube

Optional

Compliance

CE

Specifications