AA02A

MAnOMETER

The AA02A is an advanced general purpose absolute heated capacitance manometer

developed specifically for use in vacuum and pressure measurement applications where

high accuracy and excellent repeatability are crucial to process success. These capacitance

manometers are internally heated to 45°, 80°, or 100°C for use in a wide variety of

processes including semiconductor deposition, optical coating, and medical sterilization.

They use state-of-the-art digital architecture throughout to produce the highest possible long-

term performance and reliability. They can be equipped with either the standard sensor or

the MKS patented etch baffle technology that greatly reduces process contamination, and

they can be configured for both new and existing processing systems. These manometers

operate on ±15 VDC or +24 VDC input voltage, and have 0 - 10 VDC analog output signals.

Two (2) independent configurable solid state trip relays for pressure are available as an

option to permit control of external components. Full Scale measurement ranges from 0.1

Torr (13.3 Pa) to 1000 Torr (133.3 kPa) are available.

Features & Benefits

• All-digitalarchitectureandimproved

thermal management provides better

long-term stability, improved accuracy,

and increased reliability

• Sensortemperaturesof45°,80°,or100°C

• Fullyweldedsensorisbuiltentirelyfrom

best-available corrosion resistance; uses

no intermediate brazing or joining

materials

• FullScalemeasurementrangesfrom0.1

Torr (13.3 Pa) to 1000 Torr (133.3 kPa)

• Pushbuttonzeropermitsadjustmentof

zero position up to 20% of product’s

Full Scale range

• Ordering options are available for either

±15 VDC or +24 VDC input voltage, and

provides 0 - 10 VDC analog output that

is linear with pressure

• StandardorMKSpatentedetchbaffle

for use in processes with condensable

byproducts

• 100%backwardscompatiblewith

previous 127, 128, 624, 625,

capacitance manometers