D25F

CAPACITANCE MANOMETER WITH TRIP POINTS

manometer, is the latest addition to the MKS family of general purpose manometers. With

two distinct measurement outputs, the D25F provides accurate, reliable, and repeatable

pressure measurements for multi-step processes. The D25F is heated to 100°C, and is

available in Full Scale ranges of 10, 100 and 1000 Torr, with a customer specified second

output at 2, 5, or 10 times lower Full Scale. The lower pressure limitation of system A/D

resolution is now minimized with higher output signal levels. The instrument operates with

±15 VDC (±5%) input at 600 mA (max.), and provides two outputs of 0 to 10 VDC linear with

pressure.

corrosive or dirty gases. Measurements are independent of gas composition. The D25F also

features two trip point relays, each separately adjustable from 0.1 to 100% of Full Scale.

Dual color LEDs indicate relay status. Typical relay uses include pump cross-over and valve

activation. The modern stainless steel enclosure provides a cleanroom compatible product.

Features & Benefits

Accurate

• Second output provides greater

resolution over the lower range of the

instrument

• Percent of Reading accuracy for more

repeatable output signal

• Provides improved sensitivity for system

I/O architecture with limited A/D

resolution

• Measures total pressure directly,

independent of gas composition

Robust

• All Inconel corrosion resistant wetted

surfaces

• Integrated sump (US Patent #5,822,685)

provides particle protection

• High overpressure rating for improved

reliability

Compatible

• Cleanroom-compatible stainless steel

package

• Compatible with earlier Baratron

capacitance manometers, MKS power

supply/readout modules and pressure

controllers