D28F datasheet(2/2 Pages) MKS

2 / 2 page

Specifications and

Ordering Information

Some Baratron® capacitance manometer products may not be exported to many end user countries without both US and

local government export licenses under ECCN 2B230.

Specifications are subject to change without notice. mksinst™ is a trademark and Baratron® is a registered trademark of MKS

Instruments, Inc., Andover, MA. VCR® is a registered trademark of Swagelok® Co., Solon OH. Inconel® is a registered

trademarkof Inco Alloys International, Inc., Huntington, WV.

D28F - 3/19

Dimensional Drawing —

Note: Unless otherwise specified, dimensions

are nominal values in inches (mm referenced).

Full Scale Ranges

1, 10, 100, 1000 Torr

Resolution

0.001% of Full Scale

Accuracy

0.25% of Reading (including non-linearity, hysteresis, and non-repeatability)

Temperature Coefficients

Zero

0.002% of Full Scale/°C

Span

0.02% of Reading/°C

Ambient Operating Temperature

15°C to 40°C

Volume

6.3 cc

Warm-Up Time

2 hours

Overpressure Limit

45 psia (310 kPa)

Materials Exposed to Gases

Inconel® (Optional fittings: 316 SS)

Input Power Required

±15 VDC ±5% @ 0.5 Amps (max.)

Output Signal

Pressure: 0 to +10 VDC into > 10K

Ω load; second output 0 to 10 VDC into > 10K Ω load over

lower range

Fittings

Standard: 1/2” (12.7 mm) tubulation; Optional: 8 VCR® female, Mini-CF, NW 16 KF, NW25 KF

Compliance

D28F

01T

Ordering Code Example: D28F01TBAE1B2

Model

Code

Configuration

D28F

Ranges mmHg (Torr)

01T

11T

100

12T

1000

13T

Fittings

1/2” Tube

8 VCR

Mini-CF

NW 16 KF

NW 25 KF

Accuracy (% of Reading)

0.25% (standard 1 thru 1000 Torr only)

Orientation/Calibration

Specific Orientation for Calibration not required

(1 Torr and above, first output)

Vertical Calibration (required below 1 Torr, first ouput)

Horizontal Calibration

(required below 1 Torr, first output)

Connector

15 pin Type “D” with Thread Locks

15 pin Type “D” with Slide Locks

Second Range Gain Ratio

2 to 1

5 to 1

10 to 1

3.87

98.30

[

]

1.38

35.05

[

]

0.21

5.33

[

]

3.15

80.01

[

]

Pin 1 At Temp Status (optional)

Pin 2 Pressure Output

Pin 4 At Temp Status Rtn (opt)

Pin 5 Power Return

Pin 6 -15 VDC PIN 7 +15 VDC

Pin 9 Htr Fail Status (opt)

Pin 10 Htr Fail Rtn Status (op

Pin 12 Pressure Output Rtn

Pin 15 Chassis Ground

Pin 14 Reserved

PIN 1

PIN 8

PIN 9

PIN 15

Zero

Coarse Zero

On The Side

1.12

[28.45]

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel: 978.645.5500

Tel: 800.227.8766 (in U.S.A.)

Web: www.mksinst.com

MKS Instruments, Inc.

Pressure & Vacuum Measurement Solutions

Six Shattuck Road

Andover, MA 01810

Tel: 978.975.2350

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