D28F

HEATED (100°C) DUAL-RANGE ABSOLUTE

manometer, is the latest addition to the MKS family of general purpose manometers. With

two distinct measurement outputs, the D28F provides accurate, reliable, and repeatable

pressure measurements for multi-step processes. The D28F is heated to 100°C and is

available in Full Scale ranges of 1, 10, 100 and 1000 Torr, with a customer specified

second output having either a 2, 5, or 10 times lower Full Scale pressure output to provide

a proportionally higher sensitivity. The lower pressure limitation of system A/D resolution is

now minimized with higher output signal levels. The D28F requires ±15 VDC (±5%) input at

500 mA (max.), and provides two outputs of 0 to 10 VDC linear with pressure.

Based on the well-established Baratron capacitance manometer technology, the sensor’s

Measurements are independent of gas composition. The modern stainless steel enclosure

provides a cleanroom-compatible product.

Features & Benefits

Accurate

• Second output provides greater

resolution over the lower range of the

instrument

• Percent of Reading accuracy for more

repeatable output signal

• Provides improved sensitivity for system

I/O architecture with limited A/D

resolution

• Measures total pressure directly,

independent of gas composition

Robust

• All Inconel corrosion resistant wetted

surfaces

• Integrated sump (US Patent #5,822,685)

provides particle protection

• High overpressure rating for improved

reliability

Compatible

• Cleanroom-compatible stainless steel

package

• Compatible with earlier Baratron

capacitance manometers, MKS power

supply/readout modules, and pressure

controllers