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DA02A Datasheet(PDF) 3 Page - MKS Instruments.

Part # DA02A
Description  TEMPERATURE-CONTROLLED ABSOLUTE BARATRON CAPACITANCE MANOMETER WITH ETHERCAT COMMUNICATIONS
PDF  4 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

DA02A Datasheet(HTML) 3 Page - MKS Instruments.

  DA02A Datasheet HTML 1Page - MKS Instruments. DA02A Datasheet HTML 2Page - MKS Instruments. DA02A Datasheet HTML 3Page - MKS Instruments. DA02A Datasheet HTML 4Page - MKS Instruments.  
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Specifications
Full Scale Ranges
0.1, 0.25, 1, 2, 10, 20, 50, 100, 200, 500, and 1000 Torr (and metric equivalents)
Resolution1
0.001% Full Scale
Operating Temperatures
Unheated Models
0 to 50°C
45°C Models
15° to 40°C
80° and 100°C Models
15° to 50°C
Accuracy2
Unheated Models
0.50% of Reading for ranges < 1 Torr; 0.25% of Reading for ranges
≥ 1 Torr
45°C Models
0.10% of Reading for ranges
≥ 1 Torr; 0.15% Reading for ranges < 1 Torr
80° and 100°C Models
0.25% of Reading for ranges
≥ 1 Torr; 0.50% of Reading for ranges < 1 Torr
Temperature Coefficients
Zero
Unheated Models
0.005% Full Scale/°C for 10 to 1000 Torr; 0.010% Full Scale/°C for 2 Torr;
0.015% Full Scale/°C for 1 Torr; 0.020% Full Scale/°C for < 1 Torr
45°C Models
0.002% Full Scale/°C for ranges
≥ 1 Torr; 0.005% Full Scale/°C for ranges < 1 Torr
80° and 100°C Models
0.002% Full Scale/°C for ranges
≥ 1 Torr; 0.010% Full Scale/°C for ranges < 1 Torr
Span
Unheated Models
0.04% Reading/°C
Heated Models
0.02% Reading/°C
Materials Exposed to Process Gases
Inconel® and Incoloy® nickel alloys
Some optional fittings may be built from 300-series stainless steel.
Internal Volume
6.3 cm3
Warmup Time
2 hours for ranges
≥ 1 Torr; 4 hours for ranges < 1 Torr
Overpressure Limit
45 psia (310 kPa)
Input Power Required
Unheated Models
+24 VDC ±10% @ 300 mA or ±15 VDC @ 300 mA
45°C Models
+24 VDC ±10% @ 600 mA or ±15 VDC @ 600 mA
80° and 100°C Models
+24 VDC ±10% @ 800 mA or ±15 VDC @ 800 mA
Output Signal
Analog
0 – 10 VDC into > 10 k
Ω load
Digital
EtherCAT
Trip Relay Option
Two (2) internally mounted process pressure trip relays, solid state, independently
adjustable by customer at atmospheric pressure from 0.5% to 100% of Full Scale
range. Relay capacity of 0.20 amps@ 30 VDC. Complies with UL1577 requirements.
Electrical Connectors
Analog
15-pin D-subminiature male
EtherCAT
Two (2) RJ45 female receptacles for incoming and network signals
External Indicators
Multicolor status LED and two (2) red/green LEDs for EtherCAT communications status
Connection Fittings
Standard
½'' (12 mm) OD tube
Optional
8 VCR® male or female, 8 VCO® female, NW16-KF, NW25-KF, and 1.33'' (34 mm) OD CF
Compliance3
CE, ETG.5003.2080 Vacuum Pressure Gauge
1 Theoretical resolution under ideal laboratory conditions. Actual resolution in service is usually determined by system design factors not under MKS’s control.
2 Includes non-linearity, hysteresis, and non-repeatability.
3 When connected to a properly shielded cable, grounded at both ends.



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