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DA02A Datasheet(PDF) 3 Page - MKS Instruments. |
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DA02A Datasheet(HTML) 3 Page - MKS Instruments. |
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3 / 4 page ![]() Specifications Full Scale Ranges 0.1, 0.25, 1, 2, 10, 20, 50, 100, 200, 500, and 1000 Torr (and metric equivalents) Resolution1 0.001% Full Scale Operating Temperatures Unheated Models 0 to 50°C 45°C Models 15° to 40°C 80° and 100°C Models 15° to 50°C Accuracy2 Unheated Models 0.50% of Reading for ranges < 1 Torr; 0.25% of Reading for ranges ≥ 1 Torr 45°C Models 0.10% of Reading for ranges ≥ 1 Torr; 0.15% Reading for ranges < 1 Torr 80° and 100°C Models 0.25% of Reading for ranges ≥ 1 Torr; 0.50% of Reading for ranges < 1 Torr Temperature Coefficients Zero Unheated Models 0.005% Full Scale/°C for 10 to 1000 Torr; 0.010% Full Scale/°C for 2 Torr; 0.015% Full Scale/°C for 1 Torr; 0.020% Full Scale/°C for < 1 Torr 45°C Models 0.002% Full Scale/°C for ranges ≥ 1 Torr; 0.005% Full Scale/°C for ranges < 1 Torr 80° and 100°C Models 0.002% Full Scale/°C for ranges ≥ 1 Torr; 0.010% Full Scale/°C for ranges < 1 Torr Span Unheated Models 0.04% Reading/°C Heated Models 0.02% Reading/°C Materials Exposed to Process Gases Inconel® and Incoloy® nickel alloys Some optional fittings may be built from 300-series stainless steel. Internal Volume 6.3 cm3 Warmup Time 2 hours for ranges ≥ 1 Torr; 4 hours for ranges < 1 Torr Overpressure Limit 45 psia (310 kPa) Input Power Required Unheated Models +24 VDC ±10% @ 300 mA or ±15 VDC @ 300 mA 45°C Models +24 VDC ±10% @ 600 mA or ±15 VDC @ 600 mA 80° and 100°C Models +24 VDC ±10% @ 800 mA or ±15 VDC @ 800 mA Output Signal Analog 0 – 10 VDC into > 10 k Ω load Digital EtherCAT Trip Relay Option Two (2) internally mounted process pressure trip relays, solid state, independently adjustable by customer at atmospheric pressure from 0.5% to 100% of Full Scale range. Relay capacity of 0.20 amps@ 30 VDC. Complies with UL1577 requirements. Electrical Connectors Analog 15-pin D-subminiature male EtherCAT Two (2) RJ45 female receptacles for incoming and network signals External Indicators Multicolor status LED and two (2) red/green LEDs for EtherCAT communications status Connection Fittings Standard ½'' (12 mm) OD tube Optional 8 VCR® male or female, 8 VCO® female, NW16-KF, NW25-KF, and 1.33'' (34 mm) OD CF Compliance3 CE, ETG.5003.2080 Vacuum Pressure Gauge 1 Theoretical resolution under ideal laboratory conditions. Actual resolution in service is usually determined by system design factors not under MKS’s control. 2 Includes non-linearity, hysteresis, and non-repeatability. 3 When connected to a properly shielded cable, grounded at both ends. |
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