TEMPERATURE-CONTROLLED ABSOLUTE

in long-term performance, accuracy, reliability, and worldwide installed base. The DA02A

Baratron capacitance manometer continues that progression of high performance into

networked systems, using industry-standard EtherCAT digital communications to connect to

complex process tools.

Based on the proven 626C absolute analog and the 627E/628E Ethernet-equipped Baratron

manometer products, the DA02A meets the current ETG.5003 Semiconductor Device

Profile and is designed for use in advanced processing systems. It uses the exact same

offers the same long lifetime, low maintenance, and high corrosion resistance as current

analog Baratron capacitance manometers. Two (2) independent configurable solid state trip

relays for pressure are available as an option to permit control for external components. It

is available in four different operating temperatures (unheated, 45°, 80°, or 100°C), eleven

different Full Scale measurement ranges from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa), and

ten different connection fittings for use in nearly any application or process.

Features & Benefits

• Industry-leading accuracy and

repeatability

• Standard product includes both analog

and EtherCAT communications

• Full Scale measurement ranges from

0.1 to 1000 Torr (13.3 Pa to 133.3 kPa)

• Inconel-based sensor offers superior

corrosion resistance to common process

gases

• Operating temperatures of unheated, 45°,

80°, or 100°C

• Excellent long-term stability

• Patented fluorine friendly etch baffle

available upon request

DA02A