E28F

Specifications and

Ordering Information

Full scale ranges

0.05, 0.1, 0.25, 1, 2, 10, 20, and 100 torr

resolution

0.001% of Full scale (0.002% of Full scale for 0.05 torr)

accuracy

0.25% of Reading (including non-linearity, hysteresis, and non-repeatability),

0.5% for <1 torr and 0.05 torr

temperature Coefficients

Zero

0.002% of Full scale/°c for 1-100 torr ranges; 0.01% of Full scale/°c for 0.1 torr and

0.02% of Full scale/°c for 0.05 torr

span

0.02% of Reading/°c

ambient operating temperature

15°c to 50°c

Volume

6.3 cc

warm-up time

2 hours for 1 torr and higher, 4 hours for < 1 torr

overpressure limit

45psia(310kPa)or120%FullScale,whicheverisgreater

Materials exposed to Gases

input power required

±15VDC±5%@0.6Amps(max.)

output signal

Pressure:0to+10VDCinto>10KΩ load

optional Features led’s and switches

Temperaturestatus:onesemiconductorswitchwillturn“ON”andcorrespondinggreenLED

willbe“ON”whentheinstrumentisattemperature.

Heaterstatus:secondsemiconductorswitchwillturn“OFF”whenheaterfailureoccursand

corresponding bi-color LED will be blinking red, otherwise light will remain green.

Fittings

NW25KF,1.33''ODCFand2.75''ODCF

Compliance

cE

specifications for semiconductor switch

Current Charge Capacity

120mA max.

switch on resistance

20

Ω max.@120mA,50°C

open Circuit Voltage

28Vmax.

capacitancemanometerproductsmaynotbeexportedtomanyendusercountrieswithoutbothUSandlocal

International,Inc.,Huntington,WV.

E28F - 12/18

© 2013-2018 mks instruments, inc.

All rights reserved.

Dimensional Drawing —

Note: Unless otherwise specified,

dimensions are nominal values in inches

(mm referenced).

B

E

B

01t

1

ordering Code example: e28F01tbe1b

Code

Configuration

e28F

E28F

pressure range Full scale

0.05

U5T

0.1

.1t

0.25

REt

1

01t

2

02t

10

11t

20

21t

100

12t

Fittings

1/2''(12.7mm)ODtube

A

8VCRfemale

B

1.33''ODCF

C

nw16 kF (range < 5000 torr)

D

8VCOfemale

E

2.75''ODCF

L

nw25 kF (range < 5000 torr)

Q

accuracy

0.25% reading (ranges

≥ 1 torr)

E

0.50% reading (ranges < 1 torr)

F

options

standard configuration, vertical calibration

1

OptionalTemperature/HeaterStatus,verticalcalibration

2

standard configuration, horizontal calibration

5

(ranges < 1 torr only)

OptionalTemperature/HeaterStatus,horizontalcalibration 6

(ranges < 1 torr only)

Connector

15pinType“D”withThreadLock

B

15pinType“D”withSlideLock

P

MKS Instruments, Inc.

Global Headquarters

2 tech Drive, suite 201

Andover, mA 01810

Tel:978.645.5500

Tel:800.227.8766(inU.S.A.)

Web:www.mksinst.com

MKS Instruments, Inc.

Pressure & Vacuum Measurement Solutions

six shattuck Road

Andover, mA 01810

Tel:978.975.2350