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MF1 Datasheet(PDF) 2 Page - MKS Instruments.

Part # MF1
Description  Compact, General purpose MFC
PDF  4 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

MF1 Datasheet(HTML) 2 Page - MKS Instruments.

  MF1 Datasheet HTML 1Page - MKS Instruments. MF1 Datasheet HTML 2Page - MKS Instruments. MF1 Datasheet HTML 3Page - MKS Instruments. MF1 Datasheet HTML 4Page - MKS Instruments.  
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16
(0.63”)
18
(0.71”)
Top View MF1 (Process Version, 4 VCR male)
25.4
(1.0”)
14.3
(0.56”)
Side Views MF1
(PROFIBUS, 4 VCR male, inlet and outlet side)
Front View MF1 (4 VCR male)
118.73
(4.67”)
Dimensional Drawing —
Note: Unless otherwise specified,
dimensions are nominal values in mm.
Fitting (compatible to)
Dimension L in mm
4VCR male
118.74 ± 1
4VCO male
110.6 ± 1
1/4” Swagelok*
107.6 ± 1
6 mm Swagelok*
107.6 ± 1
1/8'' Swagelok*
107.6 ± 1
DN 16 KF
118.74 ± 1
*without nuts and ferrules
Dimensional Drawings
Front View MF1 (DN 16 KF)
118.73
(4.67”)
Top View MF1 (USB Version, 4 VCR male)
Bottom View MF1 (4 VCR male)
118.73
(4.67”)
Top View MF1 (EtherCAT Version, 4 VCR male)
118.73
(4.67”)
118.73
(4.67”)
Top View MF1 (Modbus Process Version, 4 VCR male)
Top View MF1 (Analog IF Version, 4 VCR male)
96.3 (3.79”)
91 (3.58”)
64.6 (2.54”)
25 (.98”)
12.7 (0.5”)
0
96 (3.78”)
91 (3.58”)
64.6 (2.54”)
25 (.98”)
12.7 (0.5”)
0



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