Ordering Information

Electrical Interfaces

*

Onlyavailableforfittingtypes4VCR,1/4''Swagelok,and6mmSwagelok

** NotinconjunctionwithsealmaterialFFKM

*** NotforFullScalerangeslargerthan10000sccmN

± 15 VDC Supply

Pin

1

Valve Override

2

Flow Signal

3

+15V

4

Power Ground

5

-15V

6

Set Point Signal

7

Signal Ground

8

reserved

9

reserved

Pinout Analog 9 Pin Sub D —

InterfaceOption”A”

forsupplyvoltage/analogSignal

Connector:9-pinD-Sub

+24 VDC Supply

Pin

1

Valve Override

2

Flow Signal

3

+24V

4

Signal Ground

5

Power Ground

6

Set Point Signal

7

Signal Ground

8

reserved

9

reserved

(no configuration necessary)

± 15 VDC Supply

Pin

1

reserved

2

Flow Signal

3

Valve Close

4

Valve Open

5

Power Ground

6

-15V

7

+15V

8

Set Point Signal

9

NC

10

NC

11

Signal Ground

12

Signal Ground

13

NC

14

NC

15

Chassis

+24 VDC Supply

Pin

1

reserved

2

Flow Signal

3

Valve Close

4

Valve Open

5

Signal Ground

6

Power Ground

7

+24V

8

Set Point Signal

9

NC

10

NC

11

Signal Ground

12

Signal Ground

13

NC

14

NC

15

Chassis

Pinout Analog 15 Pin Sub-D—

InterfaceOption”B”

forsupplyvoltage/analogSignal

Connector:15-pinD-Sub

Pin

1

NC

2

NC

3

RXD/TXD -P

4

CNTR-P

5

DGND

6

VP

7

NC

8

RXD/TXP-N

9

NC

Pinout PROFIBUS —

InterfaceOption“4/P”

PROFIBUS-DPInterface

Connector:9-pin

D-Subsocket

Ordering Code Example: MF1C01311CRAV0

Code

MF1

MF1

Variants

Controller (standard MF1 length) with All-Metal Sensor

C

Controller (length compatible to 1179A/B)

K* (on request)

Meter (standard MF1 length) with All-Metal Sensor

M

Meter (length compatible to 179A/B)

W* (on request)

Gas To Be Calibrated For (SEMI Gas Code), other options on request

N

2

013

He

001

Ar

004

H

2

007

Air

008

O

2

015

Full Scale Range of Calibrated Gas with Flow Unit (maximum 50000 sccm / 50 slm N

10 sccm

11C

20 sccm

21C

50 sccm

51C

100 sccm

12C

200 sccm

22C

500 sccm

52C

1000 sccm

13C

2000 sccm

23C

5000 sccm

53C

10000 sccm

14C

20000 sccm

24C**

30000 sccm

34C**

50000 sccm

54C**

10 slm (not for analog versions)

11L

20 slm (not for analog versions)

21L**

30 slm (not for analog versions)

31L**

50 slm (not for analog versions)

51L**

Fittings (compatible with)

4 VCR male

R

1/4’’ Swagelok

S

1/8’’ Swagelok

P

4 VCO male

G (on request)

6 mm Swagelok

M

DN 16 KF

D

MKS Surface Mount

on request

Interface

Analog, 9-pin D-Sub male

A

Analog, 15-pin D-Sub male

B

PROFIBUS-DPV0, 9-pin D-Sub female

4

PROFIBUS-DPV1, 9-pin D-Sub female

P

Modbus, RS485, 9-pin D-Sub male

M

USB

U

EtherCAT

T

PROFINET

F

Modbus TCP, RJ45

L

Seal Materials

FKM (Plug = 70 FKM 576, Sealing = FKM1170)

V

NBR (Plug = 70 NBR 150, Sealing = 70 NBR)

B (on request)

FFKM (Plug = 75 Simriz 484, Sealing = FFPM/FFKM)

K*** (on request)

Extras / Options Meaning of Extension Behind

No Extras

0

Firmware Revision

Specials

SSS

Special Number

Initial Configuration File Supplied

C

Filename

Optional Accessories

1-Channel Power Supply and Readout Unit with RS232

PR4000B-S2V2

2-Channel Power Supply and Readout Unit with RS232

PR4000B-F2V2

4-Channel Power Supply and Readout Unit with RS232

647C4R1N

8-Channel Power Supply and Readout Unit with RS232

647C8R1N

Cabling for MF1

To connect MF1 with analog process interface to PR4000, 647, 247D, 246

CBE147-12-3M

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel:

978.645.5500

Tel:

800.227.8766 (in U.S.A.)

Web: www.mksinst.com

MKS Instruments, Inc.

Flow Solutions

Six Shattuck Road

Andover, MA 01810

Tel:

978.975.2350

MKS Instruments

Deutschland GmbH

Schatzbogen 43,

D-81829 München

Tel: +49 (0) 89 42 00 08 0

Fax: +49 (0) 89 42 41 06

MF1 - 1/2018

© 2013-2018 MKS Instruments, Inc.

All rights reserved.

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.

trademark of Microsoft Corporation, Redmond, WA.