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MH1RT Datasheet(PDF) 5 Page - ATMEL Corporation

Part # MH1RT
Description  Radiation Tolerant 0.35 um CMOS
PDF  22 Pages
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Manufacturer  ATMEL [ATMEL Corporation]
Direct Link  http://www.atmel.com
Logo ATMEL - ATMEL Corporation

MH1RT Datasheet(HTML) 5 Page - ATMEL Corporation

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MH1RT QualPack
Rev.2 – Jan. 2002
5
3.2 Product Design
Pad size opening
80
µm * 100µm
Logic Effective Channel Length
0.35
µm
Gate Poly Width
0.35
µm
Gate Poly Spacing
0.49
µm
Metal 1 Width
0.42
µm
Metal 1 Spacing
0.49
µm
Metal 2 Width
0.56
µm
Metal 2 Spacing
0.49
µm
Metal 3 Width
0.56
µm
Metal 3 Spacing
0.49
µm
Metal 4 Width
0.56
µm
Metal 4 Spacing
0.49
µm
Contact Size
0.35
µm
Contact Spacing
0.49
µm
Via 1 Size
0.42
µm
Via 2 Size
0.42
µm
Test Vehicles:
Die Size:
5280*8130 (42.9mm²)
Pad Size
80
µm * 100µm
Code:
EV29
Mask:
A5500
Number of metal levels:
3
Die Size:
13097*13097 (169.78mm²)
Pad Size
80
µm * 100µm
Code:
DRAF (MH242S)
Mask:
A5544
Number of metal levels:
4
Die Size:
6601*6601 (30.9mm²)
Pad Size
90
µm * 90µm
Code:
65809E
Mask:
A5552
Number of metal levels:
3



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