LS-T3 datasheet(59/64 Pages) IDEC

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SEMI EMO Switch Guards

SEMI S2-compliant Combinations

EMO Switch Guard

Applicable Emergency Stop Switches

XA9Z-KG1

XA1E-BV4****-EMO ( ), XA1E-BV3 ( ), XA1E-LV3 ( ), XA1E-BV4 ( ), XA1E-LV4 ( )

HW9Z-KG3

XW1E-BV4****-EMO ( ), XW1E-BV4 ( ), XW1E-LV4 ( ), XW1E-TV4 ( ), HW1B-V3 ( ), HW1B-V4 ( ),

HW1B-X4 ( ), HW1B-Y2 ( )

HW9Z-KG4

XW1E-BV4****-EMO ( ), XW1E-BV4 ( ), XW1E-LV4 ( ), XW1E-TV4 ( ), XW1E-BV5 ( ) HW1B-V3 ( ),

HW1B-V4 ( ), HW1E ( ), HW1B-X4 ( ), HW1B-Y2 ( )

HW9Z-KG5

XW1E-BV4****-EMO ( ), XW1E-BV4 ( ), XW1E-LV4 ( ), XW1E-TV4 ( ), XW1E-BV5 ( ), HW1B-V3 ( ),

HW1B-V4 ( ), HW1E ( ), HW1B-X4 ( ), HW1B-Y2 ( )

Note:

EMO switch guards have been designed for applications in semiconductor manufacturing equipment only. Do not use EMO switch guards

with emergency stop switches which are installed on machine tools or food processing machines. (Machinery Directive of the

European Commission and IEC 60204-1 require that emergency stop switches be installed in a readily accessible area, and the usage of

switch guards is not permitted.)

About SEMI

SEMI is an international industry association whose member companies produce materials, equipment, and related technology for

manufacturing semiconductor, flat panel display (FPD), and micro-electromechanical systems (MEMS) products. The SEMI safety guideline

was published for the semiconductor industry and it is observed with the same importance as standards.

SEMI S2-0706, 12.1 describes as follows; “The equipment should have an ‘emergency off’ (EMO) circuit. The EMO actuator (e.g., button),

when activated, should place the equipment into a safe shutdown condition, without generating any additional hazard to personnel or the

facility.” Because the semiconductor environment involves solvents and chemicals in many cases, some of which are toxic, interrupting the

power source may cause secondary accidents. SEMI safety guideline requires the installation of an emergency off switch which disconnects

only the part responsible for the hazardous situation, and maintains the functions of safety-related devices (e.g., smoke detectors, gas/water

leak detectors, pressure measurement devices, etc.).

Emergency off buttons should be located or guarded to minimize accidental activation (SEMI S2-0706, 12.5.1). The emergency off button

should be red and mushroom shaped. A yellow background for the EMO should be provided (SEMI S2-0706, 12.3).

The combination of IDEC’s EMO switch guards and emergency stop switches

are approved by TÜV Rheinland for compliance with SEMI S2 standards.

XA9Z-KG1

HW9Z-KG3

HW9Z-KG4

HW9Z-KG5

838 mm

minimum

1638 mm

maximum

(3 m maximum)

EMO button

Operator

• Location of EMO switches on semiconductor manufacturing equipment

Acceptance criteria: controls should not be located above 1638 mm (64.5 in.) or below 838 mm (33 in.)

(SEMI S8-0705, 9.1.2).

• No operation or regularly scheduled maintenance location should require

more than 3 m (10 feet) travel to an EMO button (S2-0706, 12.5.2).

EMO

LS-T3 Datasheet(PDF) 59 Page - IDEC Corporation

LS-T3 Datasheet(HTML) 59 Page - IDEC Corporation

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