ACEINNA MFC2030 v1.05

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CONFIDENTIAL

High Performance Bi-Directional

Digital MEMS Gas Flow Sensor

MFC2000 Series

FEATURES



Bi-directional flow (±30 or ±70SLM)



High dynamic range



±3% m.v. accuracy



±0.8% m.v. repeatability



Low power consumption



Fast response time



Single 2.7 - 5.5Vdc power supply



Digital I2C output



Standard push-in fitting sizes



Custom fluid connector available



Temperature compensated



Highly configurable firmware



Easy-to-use PC-based GUI



RoHS and WEEE compliant

APPLICATIONS

 Medical gas flow measurement and control

 Industrial gas flow measurement and control

 Consumer products

DESCRIPTION

MFC2000 series is a new gas flow sensing module

platform based on ACEINNA

’s proprietary CMOS

technology for thermal mass flow sensing. It can

measure up to 70 SLM bi-directional flow rate with +/-

3.0% accuracy.

The sensing element is monolithically integrated with

CMOS signal processing circuitry and embedded

software capable of converting gas flow rates to a

digital output with very high repeatability. The module

has very low operating power consumption (< 5 mA)

and a low power consumption sleep mode (<100 µA)

for

optimal

power

management

in

portable

applications. The MFC2000 series is

externally powered, up to 5.5V (3.3V typ.). I2C digital

output is standard. Other output available upon

request.

The MFC2000 series includes firmware that is highly

configurable, offering the user a variety of settings that

can be tailored to specific applications. This includes

data output type, calibration settings, measurement

modes, and power consumption. A user-friendly PC-

based application offers the user a variety of data

collection

options,

including

real-time

graphical

display. Mechanically, the unit includes fittings that

can accept a variety of standard inlet tube sizes.

MFC2000 series is a true thermal mass flow sensing

module, and can easily be configured to suit a variety

of

applications,

from

medical

flow

to

industrial

processing. Customized versions, including customer

specific bulk channel and mounting options are

available.

For more information, please contact ACEINNA at

info@ACEINNA.com.

Information furnished by ACEINNA is believed to be accurate and reliable. However, no

responsibility is assumed by ACEINNA for its use, or for any infringements of patents or

other rights of third parties, which may result from its use.

No license is granted by

implication or otherwise under any patent or patent rights of ACEINNA.

ACEINNA, Inc.

One Technology Drive, Suite 325, Andover, MA 01810, USA

Tel: +1 978 738 0900

Fax: +1 978 738 0196

www.ACEINNA.com

MFC2030

±30 SLM version.