ACEINNA MFC2030 v1.10

Page 2 of 8

CONFIDENTIAL

SENSOR CHARACTERISTICS

(Measurements performed with air at 23

C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply,

unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.

Parameter

Condition

30 SLM

70 SLM

Unit

Measurement Range

Straight/Manifold Mounting

+/- 30

+/- 70

SLM

Flow Direction

Bi-directional

N/A

Supply DC Voltage

(VDD)

2.7

– 5.5

Vdc

Interface Voltage1

(VDDIO)

(See note 1)

2.7

– 3.0

V

Output Range

I2C Mode2

0

– 65,535

LSB

Operating Temperature

(20)

– 80

C

Calibrated Temperature

0

– 50

C

Storage Temperature

(40)

– 85

C

Relative Humidity

non-condensing

0

– 95

%

Supply Current3

Operating mode

5

mA

Sleep mode

100

µA

Accuracy4

0.01Qmax ≤ Q < Qmax

3.0

% m.v.

Q < 0.01Qmax

0.03

% F.S.

Repeatability5

ODR =

100Hz

0.1Qmax ≤ Q ≤ Qmax

0.8

% m.v.

Q < 0.1Qmax

0.08

% F.S.

ODR =

10Hz

0.1Qmax ≤ Q ≤ Qmax

0.3

% m.v.

Q < 0.1Qmax

0.03

% F.S.

RMS Noise at Zero Flow

ODR = 100Hz

25

sccm

ODR = 10Hz

8

sccm

Offset Shift w/Temp.

0 - 50

C

2

SCCM/

C

Total Error Band4

0 - 50

C, 0.1Qmax ≤ Q ≤ Q

max

3.5

% m.v.

Pressure Drop

Qmax

4

18

mbar

Sample Rate

10

msec

Orientation Sensitivity

< 60

sccm

Wake Time

Wake up from sleep mode

40

msec

Working Pressure

0 - 8

Bar

Module Weight

Includes aluminum inserts

< 100

g

Wetted Material

Si, SiO2, Si3N4, Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber,

Aluminum alloy 3003, Epoxy, Silicone

Note 1: VDDIO is generated internally and should be used to set the logic high voltage for I2C interface. VDDIO can

supply a current up to 100 mA.

Note 2:

Use two’s complement as binary signed number representation.

Note 3:

Power consumption can be optimized using “Power-Cycle” configuration to program the wake and sleep

duration.

Note 4: Accuracy is defined as the sum of all dc errors (linearity) at 23

C. Error Band is defined as the sum of

accuracy and offset/span due to temperature. Both are measured after factory calibration, using internal

averaging (100x) to eliminate errors due to noise. If the end application requires a high Output Data Rate

(ODR), and cannot benefit from averaging, the total RMS error of any given measurement can be

calculated by adding the repeatability specification.

Note 5: Repeatability is defined as standard deviation divided by mean flow (% m.v.), or standard deviation divided

by F.S. (% F.S.). Average/ODR is programmable.