UVblade Datasheet

UVblade Performance

Example of UVblade 750 2D-beam profile, short and long axis cross sections in the substrate plane.

SPECIFICATIONS1

UVblade

250

UVblade

380

UVblade

465

UVblade

750

UVblade

750HP

UVblade

1000

Wavelength (nm)

308

308

308

308

308

308

Laser Pulse Energy (mJ)

580

1000

1000

1000

2000

2000

Repetition Rate (Hz)

200

600

600

600

600

600

Energy Density (mJ/cm2) (at 96%)

370

450

360

340

320

315

Beam Length (mm)

250

380

465

750

750

950

Beam Width (µm) (at 96%)

400

400

400

250

500

400

Homogeneity Long Axis (%, 2σ)

1.8

1.8

1.8

1.8

1.8

1.8

Depth of Focus (µm)

±200

±200

±150

±100

±150

±100

1 Large number of system combinations enabling optimum throughput, CoO and CAPEX.