Mass flow controller (MFC)

VEFC-L-6-100-D31-Q10-Q10-MRM1

Part number: 8204591

General operating condition

Data sheet

Feature

Value

Degree of protection

IP20

Flow rate control range

5 l/min ... 100 l/min

Note on the flow rate control range

N2 equivalent, the specified dynamic and accuracy values apply to

setpoint values >10 %FS

Flow direction

Non-reversible

Operating pressure

0.6 MPa

Operating pressure

6 bar

Overload pressure

0.8 MPa

Overload pressure

8 bar

Overload pressure

116 psi

Burst pressure

2.1 MPa

Burst pressure

21 bar

Burst pressure

305 psi

Inlet pressure 1 MPa

0.1 MPa ... 0.7 MPa

Inlet pressure 1

1 bar ... 7 bar

Inlet pressure 1 psi

14.5 psi ... 101.5 psi

Output pressure 2

-0.1 MPa ... 0.35 MPa

Outlet pressure 2

-1 bar ... 3.5 bar

Output pressure 2

-14.5 psi ... 50.8 psi

Suitability for vacuum

yes

Valve function

2-way proportional flow control valve

Actuation type

Electrical

Pneumatic connection 1

QS-10

Pneumatic connection 2

QS-10

Total leakage

0.6 l/h

Note on total leakage

standardized according to SEMI E16 tested with CDA

Relative air humidity

5 - 85 %

Non-condensing

Climatic category

3K22 as per EN 60721

Nominal altitude of use above sea level

<= 2000 m NHN

Operating medium

Compressed air as per ISO 8573-1:2010 [7:4:4]

Inert gas

Temperature of medium

5 °C ... 50 °C

Ambient temperature

5 °C ... 50 °C

Storage temperature

-20 °C ... 60 °C

Nominal operating voltage DC

24 V

4/6/26 - Subject to change - Festo SE & Co. KG

1/2