Performance

2 – 20 sccm

Inlet Pressure Range

4 – 1200 Torr (with vacuum at the outlet)

<10 Torr at F.S. flow (with vacuum at the outlet)

Maximum Purge Pressure

150 psig

Burst Pressure

1500 psig

Control Range

2 to 100% of F.S.

Typical Accuracy

±1% of set point for >10 to 100% F.S. and

±0.2% of F.S. for 2 to 10% of F.S.

at inlet pressures >20 Torr

Repeatability

0.2% of F.S.

Resolution

0.1% of Reading

Temperature Coefficients

Zero

±0.08% of F.S./°C

Span

±0.08% of Rdg/°C

Controller Settling Time

<2 sec. typical above 10% of F.S. at inlet pressures >10 Torr

(per Semi Guideline E17-0600)

Warm-up Time

<30 min.

(to within 0.2% of F.S. of steady state performance)

Normal Operating Temperature

10 to 50°C

Storage Humidity

0 to 95% Relative Humidity, no condensing

Storage Temperature

-20 to 65°C

Temperature Display

0 to 100°C

Temperature Readout Units

°C

Temperature Accuracy

±2°C

Temperature Resolution

0.1°C

Mechanical

Fittings

Display

4 digits for value, 4 characters for unit

Leak Integrity

External (scc/sec He)

Through Closed Valve

<1.0% of FS at 25 psig to atmosphere

Wetted Materials

Standard

316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality),

316 S.S., Elgiloy, KM-45, NiTi

Surface Finish

5 microinch average Ra

Weight

Less than 2 lbs. (0.9 kg)

Electrical

Connectors

Analog (power & I/O)

9 pin D male or 15 pin D male

Diagnostics

Ethernet

Input Voltage

15-24 VDC ±5%VDC @ 350mA peak, 250 mA steady state

Set Point Command Signal

0 to 5 VDC

Output Signal

0 to 5 VDC

Specifications