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P2A Datasheet(PDF) 4 Page - MKS Instruments.

Part # P2A
Description  Mass Flow Contro ller for Ion ImplanT Applicatiotions
PDF  4 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

P2A Datasheet(HTML) 4 Page - MKS Instruments.

  P2A Datasheet HTML 1Page - MKS Instruments. P2A Datasheet HTML 2Page - MKS Instruments. P2A Datasheet HTML 3Page - MKS Instruments. P2A Datasheet HTML 4Page - MKS Instruments.  
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T
P2A
035
500
Ordering Information
πMFC_LowPress - 1/18
© 2007-2018 MKS Instruments, Inc.
All rights reserved.
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc., Andover, MA.
SDS® and VAC® are registered trademarks of ATMI, Inc. and Matheson Tri-Gas, San Jose, CA. Teflon® is a registered
trademark of E.I. Dupont Co., Inc., Wilmington, DE. Swagelok® and VCR® are registered trademarks of Swagelok
Marketing Co., Solon, OH.
R
A
* The Full Scale flow rate is designated by a three digit number. The first two digits represent the significant digits of the Full Scale flow rate
separated by a decimal point. The third digit is the exponent of the power of ten.
Example flow rate code:
500 is 5.0 x 100 or 5 sccm
151 is 1.5 x 101 or 15 sccm
MKS Instruments, Inc.
Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810
Tel:
978.645.5500
Tel:
800.227.8766 (in U.S.A.)
Web: www.mksinst.com
MKS Instruments, Inc.
Flow Solutions
Six Shattuck Road
Andover, MA 01810
Tel:
978.975.2350
2
Ordering Code Example: P2A035500RAT2
Code
Configuration
πMFC Mass-Flo Controller (multi-gas, multi-range)
P2A
Gas
013 = Nitrogen = N
2
013
096 = Arsenic Pentaflouride = AsF
5
096
035 = Arsine = AsH
3
035
048 = Boron Triflouride = BF
3
048
099 = Germanium Tetraflouride = GeF
4
099
023 = Hydrogen Selenide = H
2Se
023
031 = Phosphine = PH
3
031
062 = Phosphorus Triflouride = PF
3
062
088 = Silicon Tetraflouride = SiF
4
088
Based on 100% gas concentration, for other gases or mixtures, consult factory.
Flow Range Full Scale*
2 sccm
consult factory
5 sccm
500
10 sccm
101
20 sccm
201
Fittings
Swagelok 4 VCR male
R
Connector
9 pin D
A
15 pin D
B
Valve
Normally Closed, Teflon®
T
Flow Orientation
Vertical Flow
1
Horizontal Flow
2



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