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CIRRUS3 Datasheet(PDF) 3 Page - MKS Instruments.

Part # CIRRUS3
Description  POWERFUL AND VERSATILE ATMOSPHERIC GAS ANALYSIS
PDF  4 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

CIRRUS3 Datasheet(HTML) 3 Page - MKS Instruments.

  CIRRUS3 Datasheet HTML 1Page - MKS Instruments. CIRRUS3 Datasheet HTML 2Page - MKS Instruments. CIRRUS3 Datasheet HTML 3Page - MKS Instruments. CIRRUS3 Datasheet HTML 4Page - MKS Instruments.  
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Dimensions & Weight
BenchtopSystem
593mmLx291mmWx470mmH,35Kg
Rack-mountSystem
577mmLx482mmWx266mm(6U)H,35Kg
Mass Range
1-100amu;100HP,1-200amuand1-300amuoptions
Detection Limits
Gas dependent, typically < 100 ppb for non-interfering species
Electron Energy & Emission Current
operator variable
Operating Temperature and Humidity Range
5°Cto35°C,20%to80%RH(non-condensing)
Oven Temperature
180°Cforbakeout.User-definableforoperation–typically80°C
Capillary Inlet
2.0m long with ¼'' Swagelok® end connection, heated to 150°C
(optional heating to 300°C, with stainless steel only).
Standard fused silica and optional stainless steel. User-definable temperature
control.
Gas Consumption
20 ml/min (Lower uptake rate capillaries options are available)
Sample Pressure
1 bar nominal
Pumping System
Highcompressionturbo-molecularpumpwithinternal4-stagediaphragm
backing pump standard. Corrosive gas tolerant pumping with all internal pumps
optional.
Vacuum Hardware
60 l/s turbo molecular pump with high conductance analyzer housing, inlet
system, automated vacuum controller (RVC) completely interlocked and
integrated.
Automated Inlet Pressure Controller
A 640 (Baratron® capacitance manometer based) automated inlet pressure
controller is available as an option
Recommended PC Spec
Microsoft 32 bit or 64 bit Windows 7 or 10
Computer Interface
1 x RJ45 Ethernet LAN port required
I/O Capability
4 analog inputs (-11 to +11 volt, 22 bit)
2 analog outputs (0-10 volt, 12 bit)
16 TTL digital I/o
Power
Universalmainsinput100–240VAC/50–60Hz
Power required: 700W maximum (during bakeout); 300W typical
Compliance
CE
Cirrus 3 rack-mount configuration
Specifications
Process Eye™ Professional Software
Cirrus 3 is operated using proven Process Eye
Professional software, a recipe-driven platform that
communicates with the system over a TCP/IP network.
Process Eye Professional is designed for use with the
latest Microsoft® operating systems including 32 bit or 64
bit Windows® 7 and 10.
Features and Benefits include:
• Datapresentedinunitsrelevanttotheapplication
• Fullyautomatedoperationandcalibration
• Newworkflow''Recipes''forquantitativeapplications
• User-configurablealarmsandwarnings
• Canbeconfiguredtotrackdatafromotherprocess
sensors (temperature, pressure, flow, etc.)
Options
• Multiplegasstreaminlet(4-,8-or16-way)
• Corrosivegassamplingversion
• Regulatedionsourcepressureoptiontocompensatefor
variation in inlet pressure and gas composition
• Highmassresolution(1-100amuHP)



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