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CIRRUS3 Datasheet(PDF) 3 Page - MKS Instruments. |
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CIRRUS3 Datasheet(HTML) 3 Page - MKS Instruments. |
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3 / 4 page ![]() Dimensions & Weight BenchtopSystem 593mmLx291mmWx470mmH,35Kg Rack-mountSystem 577mmLx482mmWx266mm(6U)H,35Kg Mass Range 1-100amu;100HP,1-200amuand1-300amuoptions Detection Limits Gas dependent, typically < 100 ppb for non-interfering species Electron Energy & Emission Current operator variable Operating Temperature and Humidity Range 5°Cto35°C,20%to80%RH(non-condensing) Oven Temperature 180°Cforbakeout.User-definableforoperation–typically80°C Capillary Inlet 2.0m long with ¼'' Swagelok® end connection, heated to 150°C (optional heating to 300°C, with stainless steel only). Standard fused silica and optional stainless steel. User-definable temperature control. Gas Consumption 20 ml/min (Lower uptake rate capillaries options are available) Sample Pressure 1 bar nominal Pumping System Highcompressionturbo-molecularpumpwithinternal4-stagediaphragm backing pump standard. Corrosive gas tolerant pumping with all internal pumps optional. Vacuum Hardware 60 l/s turbo molecular pump with high conductance analyzer housing, inlet system, automated vacuum controller (RVC) completely interlocked and integrated. Automated Inlet Pressure Controller A 640 (Baratron® capacitance manometer based) automated inlet pressure controller is available as an option Recommended PC Spec Microsoft 32 bit or 64 bit Windows 7 or 10 Computer Interface 1 x RJ45 Ethernet LAN port required I/O Capability 4 analog inputs (-11 to +11 volt, 22 bit) 2 analog outputs (0-10 volt, 12 bit) 16 TTL digital I/o Power Universalmainsinput100–240VAC/50–60Hz Power required: 700W maximum (during bakeout); 300W typical Compliance CE Cirrus 3 rack-mount configuration Specifications Process Eye™ Professional Software Cirrus 3 is operated using proven Process Eye Professional software, a recipe-driven platform that communicates with the system over a TCP/IP network. Process Eye Professional is designed for use with the latest Microsoft® operating systems including 32 bit or 64 bit Windows® 7 and 10. Features and Benefits include: • Datapresentedinunitsrelevanttotheapplication • Fullyautomatedoperationandcalibration • Newworkflow''Recipes''forquantitativeapplications • User-configurablealarmsandwarnings • Canbeconfiguredtotrackdatafromotherprocess sensors (temperature, pressure, flow, etc.) Options • Multiplegasstreaminlet(4-,8-or16-way) • Corrosivegassamplingversion • Regulatedionsourcepressureoptiontocompensatefor variation in inlet pressure and gas composition • Highmassresolution(1-100amuHP) |
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