CIRRUS3 datasheet(4/4 Pages) MKS

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Ordering Information

Cirrus 3 - 11/18

Dimensional Drawing —

Note: Unless otherwise specified, dimensions are nominal values in millimeters.

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.

Some Baratron® capacitance manometer products may not be exported to many end user countries without both US

and local government export licenses under ECCN 2B230.

Specifications are subject to change without notice. mksinst™, Cirrus™, and Process Eye™ are trademarks and

Baratron® is a registered trademark of MKS Instruments, Inc. Microsoft® and Windows® are registered trademarks of

Microsoft Corporation. Swagelok® is a registered trademark of Swagelok Marketing Co.

Rack-mount Instrument Product Ordering Codes:

Cirrus 3 (100 amu): 473-12E-ASP30

Cirrus 3 (200 amu): 473-22E-ASP30

Cirrus 3 (300 amu): 473-32E-ASP30

Benchtop Instrument Product Ordering Codes:

Cirrus 3 (100 amu): 474-12E-ASP30

Cirrus 3 (200 amu): 474-22E-ASP30

Cirrus 3 (300 amu): 474-32E-ASP30

For other options such as filament type, corrosion resistance, inlet pressure control, lower inlet flow capillaries and capillary material and temperature,

contact a local MKS sales office for applications assistance.

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel:

978.645.5500

Tel:

800.227.8766 (in USA)

Web: www.mksinst.com

MKS Instruments, Inc.

Mass Spectrometry

Solutions

3635 Peterson Way

Santa Clara, CA 95054

Tel: 408.750.0300

MKS Instruments, Inc.

Mass Spectrometry

SolutionsS sis

Cowley Way

Crewe, Cheshire CW1 6AG

Tel: +44.1270.250150

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