Type 8735

9 | 11

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6.

Product operation

6.1. Measuring principle

Measurement takes place via bypass. A laminar flow element (LFE) in the main channel creates a low pressure drop. A part of the gas flow

is thereby directed into a side channel. A sensor measures the mass flow as temperature difference. The measurement is performed in a

specially shaped flow channel whose wall contains a Si chip with an etched membrane. A heating resistor and 2 temperature sensors, one

upstream and one downstream, are placed on this membrane.

If the heating resistor is fed with a constant voltage, the differential voltage of the temperature sensors indicate the gas flow over the chip.